Deep learning for non-parameterized MEMS structural design

Abstract The geometric designs of MEMS devices can profoundly impact their physical properties and eventual performances. However, it is challenging for researchers to rationally consider a large number of possible designs, as it would be very time- and resource-consuming to study all these cases us...

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Bibliographic Details
Main Authors: Ruiqi Guo, Fanping Sui, Wei Yue, Zekai Wang, Sedat Pala, Kunying Li, Renxiao Xu, Liwei Lin
Format: Article
Language:English
Published: Nature Publishing Group 2022-08-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-022-00432-9