Design and analysis of a low crosstalk error nested structure two-dimensional micro-displacement stage
In order to solve the low coupling displacement and high crosstalk error of multi-dimensional micro-displacement stage, a two-dimensional micro-displacement stage based on flexure hinges and piezoelectric ceramics is designed and analyzed. The whole stage adopts a nested parallel structure. The desi...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2021-04-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/16878140211014061 |