Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces
Fabrication of metasurfaces with nanoscale structures is inefficient for large areas. Here, the authors introduce patterned pulse laser lithography for creating structured arrays with sub-wavelength feature on large-area thin films under ambient conditions.
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-10-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-022-33644-8 |
| _version_ | 1811194890784079872 |
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| author | Lingyu Huang Kang Xu Dandan Yuan Jin Hu Xinwei Wang Shaolin Xu |
| author_facet | Lingyu Huang Kang Xu Dandan Yuan Jin Hu Xinwei Wang Shaolin Xu |
| author_sort | Lingyu Huang |
| collection | DOAJ |
| description | Fabrication of metasurfaces with nanoscale structures is inefficient for large areas. Here, the authors introduce patterned pulse laser lithography for creating structured arrays with sub-wavelength feature on large-area thin films under ambient conditions. |
| first_indexed | 2024-04-12T00:33:50Z |
| format | Article |
| id | doaj.art-27cfa2f1b1414348b6cdad8566d23400 |
| institution | Directory Open Access Journal |
| issn | 2041-1723 |
| language | English |
| last_indexed | 2024-04-12T00:33:50Z |
| publishDate | 2022-10-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Nature Communications |
| spelling | doaj.art-27cfa2f1b1414348b6cdad8566d234002022-12-22T03:55:12ZengNature PortfolioNature Communications2041-17232022-10-0113111010.1038/s41467-022-33644-8Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfacesLingyu Huang0Kang Xu1Dandan Yuan2Jin Hu3Xinwei Wang4Shaolin Xu5Department of Mechanical and Energy Engineering, Southern University of Science and TechnologyDepartment of Mechanical and Energy Engineering, Southern University of Science and TechnologyDepartment of Mechanical and Energy Engineering, Southern University of Science and TechnologyDepartment of Mechanical and Energy Engineering, Southern University of Science and TechnologyDepartment of Mechanical Engineering, Iowa State UniversityDepartment of Mechanical and Energy Engineering, Southern University of Science and TechnologyFabrication of metasurfaces with nanoscale structures is inefficient for large areas. Here, the authors introduce patterned pulse laser lithography for creating structured arrays with sub-wavelength feature on large-area thin films under ambient conditions.https://doi.org/10.1038/s41467-022-33644-8 |
| spellingShingle | Lingyu Huang Kang Xu Dandan Yuan Jin Hu Xinwei Wang Shaolin Xu Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces Nature Communications |
| title | Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces |
| title_full | Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces |
| title_fullStr | Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces |
| title_full_unstemmed | Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces |
| title_short | Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces |
| title_sort | sub wavelength patterned pulse laser lithography for efficient fabrication of large area metasurfaces |
| url | https://doi.org/10.1038/s41467-022-33644-8 |
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