New Fabrication Method of Silicon Sub-Micron Beams with Monolithic Contacts for Thermoelectric Transport Properties Analysis

New Fabrication Method of Silicon Sub-Micron Beams with Monolithic Contacts for Thermoelectric Transport Properties Analysis

Micromachined devices were developed and fabricated using complementary metal-oxide-semiconductor (CMOS)/micro-electro-mechanical systems (MEMS) technology allowing for the analysis of transport properties of silicon sub-micron beams having monolithic contacts. The beams were fabricated by a combina...

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Bibliographic Details
Main Authors: Andrej Stranz, Marc Salleras, Luis Fonseca
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Nanomaterials
Subjects:
silicon
thermoelectric
microdevice
CMOS fabrication
Online Access:https://www.mdpi.com/2079-4991/12/8/1326

Internet

https://www.mdpi.com/2079-4991/12/8/1326

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