Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator
Silicon photonic-based refractive index sensors are of great value in the detection of gases, biological and chemical substances. Among them, microring resonators are the most promising due to their compact size and narrow Lorentzian-shaped spectrum. The electric field in a subwavelength grating wav...
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| Format: | Article |
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MDPI AG
2024-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/24/6/1929 |
| _version_ | 1797239288828526592 |
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| author | Kaiwei Lu Beiju Huang Xiaoqing Lv Zan Zhang Zhengtai Ma |
| author_facet | Kaiwei Lu Beiju Huang Xiaoqing Lv Zan Zhang Zhengtai Ma |
| author_sort | Kaiwei Lu |
| collection | DOAJ |
| description | Silicon photonic-based refractive index sensors are of great value in the detection of gases, biological and chemical substances. Among them, microring resonators are the most promising due to their compact size and narrow Lorentzian-shaped spectrum. The electric field in a subwavelength grating waveguide (SWG) is essentially confined in the low-refractive index dielectric, favoring enhanced analyte-photon interactions, which represents higher sensitivity. However, it is very challenging to further significantly improve the sensitivity of SWG ring resonator refractive index sensors. Here, a hybrid waveguide blocks double slot subwavelength grating microring resonator (HDSSWG-MRR) refractive index sensor operating in a water refractive index environment is proposed. By designing a new waveguide structure, a sensitivity of up to 1005 nm/RIU has been achieved, which is 182 nm/RIU higher than the currently highest sensitivity silicon photonic micro ring refractive index sensor. Meanwhile, utilizing a unique waveguide structure, a Q of 22,429 was achieved and a low limit of detection of 6.86 × 10<sup>−5</sup> RIU was calculated. |
| first_indexed | 2024-04-24T17:49:10Z |
| format | Article |
| id | doaj.art-293d7fb0e9af4e05bc02fb5d9cda45b4 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-24T17:49:10Z |
| publishDate | 2024-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-293d7fb0e9af4e05bc02fb5d9cda45b42024-03-27T14:04:10ZengMDPI AGSensors1424-82202024-03-01246192910.3390/s24061929Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring ResonatorKaiwei Lu0Beiju Huang1Xiaoqing Lv2Zan Zhang3Zhengtai Ma4Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaKey Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaKey Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaSchool of Electronics and Control Engineering, Chang’an University, Xi’an 710064, ChinaKey Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaSilicon photonic-based refractive index sensors are of great value in the detection of gases, biological and chemical substances. Among them, microring resonators are the most promising due to their compact size and narrow Lorentzian-shaped spectrum. The electric field in a subwavelength grating waveguide (SWG) is essentially confined in the low-refractive index dielectric, favoring enhanced analyte-photon interactions, which represents higher sensitivity. However, it is very challenging to further significantly improve the sensitivity of SWG ring resonator refractive index sensors. Here, a hybrid waveguide blocks double slot subwavelength grating microring resonator (HDSSWG-MRR) refractive index sensor operating in a water refractive index environment is proposed. By designing a new waveguide structure, a sensitivity of up to 1005 nm/RIU has been achieved, which is 182 nm/RIU higher than the currently highest sensitivity silicon photonic micro ring refractive index sensor. Meanwhile, utilizing a unique waveguide structure, a Q of 22,429 was achieved and a low limit of detection of 6.86 × 10<sup>−5</sup> RIU was calculated.https://www.mdpi.com/1424-8220/24/6/1929silicon photonicsrefractive index sensorhybrid double slot subwavelength grating waveguideultra-high sensitivity |
| spellingShingle | Kaiwei Lu Beiju Huang Xiaoqing Lv Zan Zhang Zhengtai Ma Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator Sensors silicon photonics refractive index sensor hybrid double slot subwavelength grating waveguide ultra-high sensitivity |
| title | Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator |
| title_full | Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator |
| title_fullStr | Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator |
| title_full_unstemmed | Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator |
| title_short | Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator |
| title_sort | ultrasensitive silicon photonic refractive index sensor based on hybrid double slot subwavelength grating microring resonator |
| topic | silicon photonics refractive index sensor hybrid double slot subwavelength grating waveguide ultra-high sensitivity |
| url | https://www.mdpi.com/1424-8220/24/6/1929 |
| work_keys_str_mv | AT kaiweilu ultrasensitivesiliconphotonicrefractiveindexsensorbasedonhybriddoubleslotsubwavelengthgratingmicroringresonator AT beijuhuang ultrasensitivesiliconphotonicrefractiveindexsensorbasedonhybriddoubleslotsubwavelengthgratingmicroringresonator AT xiaoqinglv ultrasensitivesiliconphotonicrefractiveindexsensorbasedonhybriddoubleslotsubwavelengthgratingmicroringresonator AT zanzhang ultrasensitivesiliconphotonicrefractiveindexsensorbasedonhybriddoubleslotsubwavelengthgratingmicroringresonator AT zhengtaima ultrasensitivesiliconphotonicrefractiveindexsensorbasedonhybriddoubleslotsubwavelengthgratingmicroringresonator |