A Comprehensive Investigation of the Mechanical and Tribological Properties of AZO Transparent Conducting Oxide Thin Films Deposited by Medium Frequency Magnetron Sputtering

A Comprehensive Investigation of the Mechanical and Tribological Properties of AZO Transparent Conducting Oxide Thin Films Deposited by Medium Frequency Magnetron Sputtering

This paper presents a detailed analysis of aluminium-doped zinc oxide (AZO) thin films and considers them a promising alternative to indium tin oxide in transparent electrodes. The study focusses on critical properties of AZO, including optical, electrical, and mechanical properties, with potential...

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Bibliographic Details
Main Authors: Michał Mazur, Milena Kiliszkiewicz, Witold Posadowski, Jarosław Domaradzki, Aleksandra Małachowska, Paweł Sokołowski
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Materials
Subjects:
AZO
transparent conducting oxide
thin film
magnetron sputtering
hardness
nanoindentation
Online Access:https://www.mdpi.com/1996-1944/17/1/81

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