Symmetry and asymmetry from MEMS variable capacitor by nonlinear micro stoppers
Mechanical stoppers in MEMS capacitive systems can dramatically affect electrical performances and result in complicated mechanical dynamic responses. This paper introduces electromechanical coupling nonlinear dynamic responses in MEMS variable dual-capacitor with an effect of nonlinear and asymmetr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2021-01-01
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| Series: | Mechanics & Industry |
| Subjects: | |
| Online Access: | https://www.mechanics-industry.org/articles/meca/full_html/2021/01/mi210044/mi210044.html |