Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator
Microgrippers can be effectively applied for handling, positioning and assembling of the micro components. In the present study, a new design of a U-shape electrothermal microgripper was fabricated and developed with the voltages correspond between 1 to 10 volts. The microgripper was made of silicon...
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| Format: | Article |
| Language: | English |
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Islamic Azad University-Isfahan (Khorasgan) Branch
2017-08-01
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| Series: | International Journal of Advanced Design and Manufacturing Technology |
| Subjects: | |
| Online Access: | https://admt.isfahan.iau.ir/article_535015_a67c07763584f48ee300ae1e35f4a9e7.pdf |
| _version_ | 1797657239119462400 |
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| author | M. Kolahdoozan A. Rouhani Esfahani M. Hassani |
| author_facet | M. Kolahdoozan A. Rouhani Esfahani M. Hassani |
| author_sort | M. Kolahdoozan |
| collection | DOAJ |
| description | Microgrippers can be effectively applied for handling, positioning and assembling of the micro components. In the present study, a new design of a U-shape electrothermal microgripper was fabricated and developed with the voltages correspond between 1 to 10 volts. The microgripper was made of silicone with thickness of 25 microns, and pieces between 460 to 480 microns. The proposed microgripper has a simpler design and more facile fabrication comparing to most reported electrothermal microgripper. The behavior of the microgripper was simulated in COMSOL software to measure the displacement of the arms which hold and heat generations during the voltage changes. The present microgripper has more thermal and voltage tolerance comparing to other electrothermal microgripper. Furthermore, the obtained amount of tip displacement for voltage changes is acceptable. Another simulation method based on a three layer artificial neural network model (ANN) was carried out. Feed forward back propagation algorithm was employed as training algorithm to predict the displacement. The obtained results from both models proved that ANN model had better estimation due to the mean absolute percentage error of 1.024% and determination coefficient of 0.9995. Moreover, they confirm higher capability and accuracy of ANN in prediction of arms displacement compared to FEM. |
| first_indexed | 2024-03-11T17:41:39Z |
| format | Article |
| id | doaj.art-29b5cd209f5743d4a86e950b7314594d |
| institution | Directory Open Access Journal |
| issn | 2252-0406 2383-4447 |
| language | English |
| last_indexed | 2024-03-11T17:41:39Z |
| publishDate | 2017-08-01 |
| publisher | Islamic Azad University-Isfahan (Khorasgan) Branch |
| record_format | Article |
| series | International Journal of Advanced Design and Manufacturing Technology |
| spelling | doaj.art-29b5cd209f5743d4a86e950b7314594d2023-10-18T09:17:41ZengIslamic Azad University-Isfahan (Khorasgan) BranchInternational Journal of Advanced Design and Manufacturing Technology2252-04062383-44472017-08-011027181535015Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS ActuatorM. Kolahdoozan0A. Rouhani Esfahani1M. Hassani2Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad, IranDepartment of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad, IranDepartment of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad, IranMicrogrippers can be effectively applied for handling, positioning and assembling of the micro components. In the present study, a new design of a U-shape electrothermal microgripper was fabricated and developed with the voltages correspond between 1 to 10 volts. The microgripper was made of silicone with thickness of 25 microns, and pieces between 460 to 480 microns. The proposed microgripper has a simpler design and more facile fabrication comparing to most reported electrothermal microgripper. The behavior of the microgripper was simulated in COMSOL software to measure the displacement of the arms which hold and heat generations during the voltage changes. The present microgripper has more thermal and voltage tolerance comparing to other electrothermal microgripper. Furthermore, the obtained amount of tip displacement for voltage changes is acceptable. Another simulation method based on a three layer artificial neural network model (ANN) was carried out. Feed forward back propagation algorithm was employed as training algorithm to predict the displacement. The obtained results from both models proved that ANN model had better estimation due to the mean absolute percentage error of 1.024% and determination coefficient of 0.9995. Moreover, they confirm higher capability and accuracy of ANN in prediction of arms displacement compared to FEM.https://admt.isfahan.iau.ir/article_535015_a67c07763584f48ee300ae1e35f4a9e7.pdfartificial neural networkelectrothermal actuatorfinite element methodmicro electro mechanical system |
| spellingShingle | M. Kolahdoozan A. Rouhani Esfahani M. Hassani Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator International Journal of Advanced Design and Manufacturing Technology artificial neural network electrothermal actuator finite element method micro electro mechanical system |
| title | Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator |
| title_full | Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator |
| title_fullStr | Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator |
| title_full_unstemmed | Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator |
| title_short | Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator |
| title_sort | experimental and numerical investigation of the arms displacement in a new electrothermal mems actuator |
| topic | artificial neural network electrothermal actuator finite element method micro electro mechanical system |
| url | https://admt.isfahan.iau.ir/article_535015_a67c07763584f48ee300ae1e35f4a9e7.pdf |
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