Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator
Microgrippers can be effectively applied for handling, positioning and assembling of the micro components. In the present study, a new design of a U-shape electrothermal microgripper was fabricated and developed with the voltages correspond between 1 to 10 volts. The microgripper was made of silicon...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Islamic Azad University-Isfahan (Khorasgan) Branch
2017-08-01
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| Series: | International Journal of Advanced Design and Manufacturing Technology |
| Subjects: | |
| Online Access: | https://admt.isfahan.iau.ir/article_535015_a67c07763584f48ee300ae1e35f4a9e7.pdf |