An Auto-Focus Method of Microscope for the Surface Structure of Transparent Materials under Transmission Illumination
This paper is concerned with auto-focus of microscopes for the surface structure of transparent materials under transmission illumination, where two distinct focus states appear in the focusing process and the focus position is located between the two states with the local minimum of sharpness. Plea...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/7/2487 |