Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications

The use of focused ion and focused electron beam (FIB/FEB) technology permits the fabrication of micro- and nanometer scale geometries. Therefore, FIB/FEB technology is a favorable technique for preparing TEM lamellae, nanocontacts, or nanowires and repairing electronic circuits. This work investiga...

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Main Authors: Michael Haub, Thomas Guenther, Martin Bogner, André Zimmermann
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/7/1019
_version_ 1797433307661598720
author Michael Haub
Thomas Guenther
Martin Bogner
André Zimmermann
author_facet Michael Haub
Thomas Guenther
Martin Bogner
André Zimmermann
author_sort Michael Haub
collection DOAJ
description The use of focused ion and focused electron beam (FIB/FEB) technology permits the fabrication of micro- and nanometer scale geometries. Therefore, FIB/FEB technology is a favorable technique for preparing TEM lamellae, nanocontacts, or nanowires and repairing electronic circuits. This work investigates FIB/FEB technology as a tool for nanotip fabrication and quantum mechanical tunneling applications at a low tunneling voltage. Using a gas injection system (GIS), the Ga-FIB and FEB technology allows both additive and subtractive fabrication of arbitrary structures. Using energy dispersive X-ray spectroscopy (EDX), resistance measurement (RM), and scanning tunneling microscope (STM)/spectroscopy (STS) methods, the tunneling suitability of the utilized metal–organic material–platinum carbon (PtC) is investigated. Thus, to create electrode tips with radii down to 15 nm, a stable and reproducible process has to be developed. The metal–organic microstructure analysis shows suitable FIB parameters for the tunneling effect at high aperture currents (260 pA, 30 kV). These are required to ensure the suitability of the electrodes for the tunneling effect by an increased platinum content (EDX), a low resistivity (RM), and a small band gap (STM). The STM application allows the imaging of highly oriented pyrolytic graphite (HOPG) layers and demonstrates the tunneling suitability of PtC electrodes based on high FIB aperture currents and a low tunneling voltage.
first_indexed 2024-03-09T10:15:11Z
format Article
id doaj.art-2b365372f1024b499d9c9b1b0fee25b8
institution Directory Open Access Journal
issn 2072-666X
language English
last_indexed 2024-03-09T10:15:11Z
publishDate 2022-06-01
publisher MDPI AG
record_format Article
series Micromachines
spelling doaj.art-2b365372f1024b499d9c9b1b0fee25b82023-12-01T22:27:18ZengMDPI AGMicromachines2072-666X2022-06-01137101910.3390/mi13071019Use of PtC Nanotips for Low-Voltage Quantum Tunneling ApplicationsMichael Haub0Thomas Guenther1Martin Bogner2André Zimmermann3Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, GermanyInstitute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, GermanyInstitute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, GermanyInstitute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, GermanyThe use of focused ion and focused electron beam (FIB/FEB) technology permits the fabrication of micro- and nanometer scale geometries. Therefore, FIB/FEB technology is a favorable technique for preparing TEM lamellae, nanocontacts, or nanowires and repairing electronic circuits. This work investigates FIB/FEB technology as a tool for nanotip fabrication and quantum mechanical tunneling applications at a low tunneling voltage. Using a gas injection system (GIS), the Ga-FIB and FEB technology allows both additive and subtractive fabrication of arbitrary structures. Using energy dispersive X-ray spectroscopy (EDX), resistance measurement (RM), and scanning tunneling microscope (STM)/spectroscopy (STS) methods, the tunneling suitability of the utilized metal–organic material–platinum carbon (PtC) is investigated. Thus, to create electrode tips with radii down to 15 nm, a stable and reproducible process has to be developed. The metal–organic microstructure analysis shows suitable FIB parameters for the tunneling effect at high aperture currents (260 pA, 30 kV). These are required to ensure the suitability of the electrodes for the tunneling effect by an increased platinum content (EDX), a low resistivity (RM), and a small band gap (STM). The STM application allows the imaging of highly oriented pyrolytic graphite (HOPG) layers and demonstrates the tunneling suitability of PtC electrodes based on high FIB aperture currents and a low tunneling voltage.https://www.mdpi.com/2072-666X/13/7/1019quantum tunnelingfocused ion beamFIBfocused electron beamFEBEDX
spellingShingle Michael Haub
Thomas Guenther
Martin Bogner
André Zimmermann
Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications
Micromachines
quantum tunneling
focused ion beam
FIB
focused electron beam
FEB
EDX
title Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications
title_full Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications
title_fullStr Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications
title_full_unstemmed Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications
title_short Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications
title_sort use of ptc nanotips for low voltage quantum tunneling applications
topic quantum tunneling
focused ion beam
FIB
focused electron beam
FEB
EDX
url https://www.mdpi.com/2072-666X/13/7/1019
work_keys_str_mv AT michaelhaub useofptcnanotipsforlowvoltagequantumtunnelingapplications
AT thomasguenther useofptcnanotipsforlowvoltagequantumtunnelingapplications
AT martinbogner useofptcnanotipsforlowvoltagequantumtunnelingapplications
AT andrezimmermann useofptcnanotipsforlowvoltagequantumtunnelingapplications