Microlens Array Fabrication by Using a Microshaper

Microlens Array Fabrication by Using a Microshaper

A simple, easy, inexpensive, and quick nonsilicon-based micromachining method was developed to manufacture a microlens array. The spherical surface of the microlens was machined using a microshaper mounted on a three-axis vertical computer numerical control (CNC) machine with cutter-path-planning. T...

Szczegółowa specyfikacja

Opis bibliograficzny
Główni autorzy: Meng-Ju Lin, Cheng Hao Wen
Format: Artykuł
Język:English
Wydane: MDPI AG 2021-02-01
Seria:Micromachines
Hasła przedmiotowe:
micro surface shaping
cutter-path planning
micro-optoelectromechanical system (MOEMS)
microshaper
isoplane
nonsilicon-based micromachining
Dostęp online:https://www.mdpi.com/2072-666X/12/3/244

Internet

https://www.mdpi.com/2072-666X/12/3/244

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