Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor
We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-09-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/19/18/3954 |
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| author | Rugved Likhite Aishwaryadev Banerjee Apratim Majumder Mohit Karkhanis Hanseup Kim Carlos H. Mastrangelo |
| author_facet | Rugved Likhite Aishwaryadev Banerjee Apratim Majumder Mohit Karkhanis Hanseup Kim Carlos H. Mastrangelo |
| author_sort | Rugved Likhite |
| collection | DOAJ |
| description | We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary electrodes on the sides. When exposed to a humidity change, the polymer swells after absorbing the analyte and causes the central cantilever to bend laterally towards one side, causing a change in the measured capacitance. The device features an intrinsic gain due to parametric amplification resulting in an enhanced signal-to-noise ratio (SNR). Eleven-fold magnification in sensor response was observed via voltage biasing of the side electrodes without the use of conventional electronic amplifiers. The sensor showed a repeatable and recoverable capacitance change of 11% when exposed to a change in relative humidity from 25−85%. The dynamic characterization of the device also revealed a response time of ~1 s and demonstrated a competitive response with respect to a commercially available reference chip. |
| first_indexed | 2024-12-10T06:54:57Z |
| format | Article |
| id | doaj.art-2b469bb182f14294b7053d2436d13606 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-12-10T06:54:57Z |
| publishDate | 2019-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-2b469bb182f14294b7053d2436d136062022-12-22T01:58:27ZengMDPI AGSensors1424-82202019-09-011918395410.3390/s19183954s19183954Parametrically Amplified Low-Power MEMS Capacitive Humidity SensorRugved Likhite0Aishwaryadev Banerjee1Apratim Majumder2Mohit Karkhanis3Hanseup Kim4Carlos H. Mastrangelo5Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT 84112, USADepartment of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT 84112, USADepartment of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT 84112, USADepartment of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT 84112, USADepartment of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT 84112, USADepartment of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT 84112, USAWe present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary electrodes on the sides. When exposed to a humidity change, the polymer swells after absorbing the analyte and causes the central cantilever to bend laterally towards one side, causing a change in the measured capacitance. The device features an intrinsic gain due to parametric amplification resulting in an enhanced signal-to-noise ratio (SNR). Eleven-fold magnification in sensor response was observed via voltage biasing of the side electrodes without the use of conventional electronic amplifiers. The sensor showed a repeatable and recoverable capacitance change of 11% when exposed to a change in relative humidity from 25−85%. The dynamic characterization of the device also revealed a response time of ~1 s and demonstrated a competitive response with respect to a commercially available reference chip.https://www.mdpi.com/1424-8220/19/18/3954humidity sensorlow-power sensorsMEMSparametric amplificationspring softening |
| spellingShingle | Rugved Likhite Aishwaryadev Banerjee Apratim Majumder Mohit Karkhanis Hanseup Kim Carlos H. Mastrangelo Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor Sensors humidity sensor low-power sensors MEMS parametric amplification spring softening |
| title | Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor |
| title_full | Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor |
| title_fullStr | Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor |
| title_full_unstemmed | Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor |
| title_short | Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor |
| title_sort | parametrically amplified low power mems capacitive humidity sensor |
| topic | humidity sensor low-power sensors MEMS parametric amplification spring softening |
| url | https://www.mdpi.com/1424-8220/19/18/3954 |
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