Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor

Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor

We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary...

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Bibliographic Details
Main Authors: Rugved Likhite, Aishwaryadev Banerjee, Apratim Majumder, Mohit Karkhanis, Hanseup Kim, Carlos H. Mastrangelo
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Sensors
Subjects:
humidity sensor
low-power sensors
MEMS
parametric amplification
spring softening
Online Access:https://www.mdpi.com/1424-8220/19/18/3954

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