A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning
This paper presents a novel design of a planar encoder based on the principle of diffractive interferometry. The system is capable of measuring the two-dimensional displacement of the planar grating of any size. It adopts a specially designed optical path that can increase the alignment tolerance be...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Chinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA)
2011-12-01
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| Series: | International Journal of Automation and Smart Technology |
| Subjects: | |
| Online Access: | http://www.ausmt.org/index.php/AUSMT/article/view/53 |
| _version_ | 1828316375069753344 |
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| author | Kuang-Chao Fan Bor-Cheng Lee Yi-Cheng Chung |
| author_facet | Kuang-Chao Fan Bor-Cheng Lee Yi-Cheng Chung |
| author_sort | Kuang-Chao Fan |
| collection | DOAJ |
| description | This paper presents a novel design of a planar encoder based on the principle of diffractive interferometry. The system is capable of measuring the two-dimensional displacement of the planar grating of any size. It adopts a specially designed optical path that can increase the alignment tolerance between the optical head and the grating. Given the merits of its simple optical configuration and compact size, it can effectively reduce the environmental disturbance and allow higher stability. The signal processing circuit and waveform subdivision software were also developed to effectively compensate for the waveform errors and count the position to 1nm resolution. Experimental results showed that even in the normal laboratory environment the standard deviation of measured values can be controlled to within 15nm for a long stroke up to 25mm on both axes. |
| first_indexed | 2024-04-13T17:12:40Z |
| format | Article |
| id | doaj.art-2b56712f18f648ecae7463eabe03f224 |
| institution | Directory Open Access Journal |
| issn | 2223-9766 |
| language | English |
| last_indexed | 2024-04-13T17:12:40Z |
| publishDate | 2011-12-01 |
| publisher | Chinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA) |
| record_format | Article |
| series | International Journal of Automation and Smart Technology |
| spelling | doaj.art-2b56712f18f648ecae7463eabe03f2242022-12-22T02:38:13ZengChinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA)International Journal of Automation and Smart Technology2223-97662011-12-0112939910.5875/ausmt.v1i2.5314A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric PositioningKuang-Chao Fan0Bor-Cheng Lee1Yi-Cheng Chung2Department of Mechanical Engeering, National Taiwan UniversityDepartment of Mechanical Engeering, National Taiwan UniversityDepartment of Mechanical Engeering, National Taiwan UniversityThis paper presents a novel design of a planar encoder based on the principle of diffractive interferometry. The system is capable of measuring the two-dimensional displacement of the planar grating of any size. It adopts a specially designed optical path that can increase the alignment tolerance between the optical head and the grating. Given the merits of its simple optical configuration and compact size, it can effectively reduce the environmental disturbance and allow higher stability. The signal processing circuit and waveform subdivision software were also developed to effectively compensate for the waveform errors and count the position to 1nm resolution. Experimental results showed that even in the normal laboratory environment the standard deviation of measured values can be controlled to within 15nm for a long stroke up to 25mm on both axes.http://www.ausmt.org/index.php/AUSMT/article/view/53Planar encoder, Diffractive interferometer, Planar gratings, Waveform errors. |
| spellingShingle | Kuang-Chao Fan Bor-Cheng Lee Yi-Cheng Chung A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning International Journal of Automation and Smart Technology Planar encoder, Diffractive interferometer, Planar gratings, Waveform errors. |
| title | A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning |
| title_full | A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning |
| title_fullStr | A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning |
| title_full_unstemmed | A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning |
| title_short | A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning |
| title_sort | planar laser diffraction encoder in littrow configuration for 2d nanometric positioning |
| topic | Planar encoder, Diffractive interferometer, Planar gratings, Waveform errors. |
| url | http://www.ausmt.org/index.php/AUSMT/article/view/53 |
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