Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
Energy leakage via anchors in substrate plates impairs the quality factor (<i>Q</i>) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/1/62 |
| _version_ | 1797415458340601856 |
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| author | Yinjie Tong Tao Han |
| author_facet | Yinjie Tong Tao Han |
| author_sort | Yinjie Tong |
| collection | DOAJ |
| description | Energy leakage via anchors in substrate plates impairs the quality factor (<i>Q</i>) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient (<inline-formula><math display="inline"><semantics><mrow><msup><mi>k</mi><mn>2</mn></msup></mrow></semantics></math></inline-formula>) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the <i>Q</i> of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the <i>Q</i> of the resonators. |
| first_indexed | 2024-03-09T05:48:54Z |
| format | Article |
| id | doaj.art-2c52abed1c2143a18bcb4758f12a9712 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T05:48:54Z |
| publishDate | 2021-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-2c52abed1c2143a18bcb4758f12a97122023-12-03T12:18:40ZengMDPI AGMicromachines2072-666X2021-01-011216210.3390/mi12010062Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic CrystalYinjie Tong0Tao Han1School of Electronic, Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, ChinaSchool of Electronic, Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, ChinaEnergy leakage via anchors in substrate plates impairs the quality factor (<i>Q</i>) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient (<inline-formula><math display="inline"><semantics><mrow><msup><mi>k</mi><mn>2</mn></msup></mrow></semantics></math></inline-formula>) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the <i>Q</i> of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the <i>Q</i> of the resonators.https://www.mdpi.com/2072-666X/12/1/62anchor lossMEMS resonatorphononic crystalhigh quality factor |
| spellingShingle | Yinjie Tong Tao Han Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal Micromachines anchor loss MEMS resonator phononic crystal high quality factor |
| title | Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal |
| title_full | Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal |
| title_fullStr | Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal |
| title_full_unstemmed | Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal |
| title_short | Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal |
| title_sort | anchor loss reduction of lamb wave resonator by pillar based phononic crystal |
| topic | anchor loss MEMS resonator phononic crystal high quality factor |
| url | https://www.mdpi.com/2072-666X/12/1/62 |
| work_keys_str_mv | AT yinjietong anchorlossreductionoflambwaveresonatorbypillarbasedphononiccrystal AT taohan anchorlossreductionoflambwaveresonatorbypillarbasedphononiccrystal |