High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)

High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)

Integrated thin-film lithium niobate (LN) electro-optic (EO) modulators of broad bandwidth, low insertion loss, low cost and high production rate are essential elements in contemporary interconnection industries and disruptive applications. Here, we demonstrated the design and fabrication of a high...

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Bibliographic Details
Main Authors: Rongbo Wu, Lang Gao, Youting Liang, Yong Zheng, Junxia Zhou, Hongxin Qi, Difeng Yin, Min Wang, Zhiwei Fang, Ya Cheng
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Micromachines
Subjects:
lithium niobate
electro-optic modulator
insertion loss
photolithography assisted chemo-mechanical etching
Online Access:https://www.mdpi.com/2072-666X/13/3/378

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