Fabrication and Characterization of Nanonet-Channel LTPS TFTs Using a Nanosphere-Assisted Patterning Technique

Fabrication and Characterization of Nanonet-Channel LTPS TFTs Using a Nanosphere-Assisted Patterning Technique

We present the fabrication and electrical characteristics of nanonet-channel (NET) low-temperature polysilicon channel (LTPS) thin-film transistors (TFTs) using a nanosphere-assisted patterning (NAP) technique. The NAP technique is introduced to form a nanonet-channel instead of the electron beam li...

Full description

Bibliographic Details
Main Authors:	Gilsang Yoon, Donghoon Kim, Iksoo Park, Bo Jin, Jeong-Soo Lee
Format:	Article
Language:	English
Published:	MDPI AG 2021-06-01
Series:	Micromachines
Subjects:	grain boundary traps polysilicon nanonet-channel nanosphere-assisted patterning thin-film transistors
Online Access:	https://www.mdpi.com/2072-666X/12/7/741

Similar Items

Evaluation of Silicon Nanonet Field Effect Transistor as Photodiodes
by: Muhammed Kayaharman, et al.
Published: (2017-11-01)

Design and Fabrication of Single-Walled Carbon Nanonet Flexible Strain Sensors
by: Trung Kien Vu, et al.
Published: (2012-03-01)

Fabrication and UV photoresponse of ordered ZnO nanonets using monolayer colloidal crystal template
by: Yusuke Kiyomi, et al.
Published: (2022-08-01)

Blue Laser Diode Annealed Top-Gate Low Temperature Poly-Si TFTs With Low Resistance of Source/Drain From Deposited n+ Layer
by: Hongyuan Xu, et al.
Published: (2024-01-01)

Analysis of the Sensing Margin of Silicon and Poly-Si 1T-DRAM
by: Hyeonjeong Kim, et al.
Published: (2020-02-01)

On the Development of Label-Free DNA Sensor Using Silicon Nanonet Field-Effect Transistors
by: Thi Thu Thuy Nguyen, et al.
Published: (2017-08-01)

Functional Devices from Bottom-Up Silicon Nanowires: A Review
by: Tabassom Arjmand, et al.
Published: (2022-03-01)

Optimization of GOPS-Based Functionalization Process and Impact of Aptamer Grafting on the Si Nanonet FET Electrical Properties as First Steps towards Thrombin Electrical Detection
by: Monica Vallejo-Perez, et al.
Published: (2020-09-01)

Nanonets derived from turnip mosaic virus as scaffolds for increased enzymatic activity of immobilized Candida antarctica lipase B
by: Sol eCuenca, et al.
Published: (2016-04-01)

Photoconductive Properties of Polycrystalline Silicon Thin Film Annealed at High Pressure of Deuterium
by: Jae-Sung Lee
Published: (2024-01-01)

Lumped-Capacitive Modeling and Sensing Characteristics of an Electrolyte-Gated FET Biosensor for the Detection of the Peanut Allergen
by: Donghoon Kim, et al.
Published: (2021-01-01)

First-Principles Study of the Band Gap Structure of Oxygen-Passivated Silicon Nanonets
by: Lin Linhan, et al.
Published: (2009-01-01)

Analog PWM Method With Sweep Generation Structure Based on P-Type LTPS TFTs for Micro-LED Displays
by: Chih-Lung Lin, et al.
Published: (2023-01-01)

Analysis of a Lateral Grain Boundary for Reducing Performance Variations in Poly-Si 1T-DRAM
by: Songyi Yoo, et al.
Published: (2020-10-01)

On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon
by: Tiago Vicentini Ferreira do Valle, et al.
Published: (2022-11-01)

New Compact Modeling Solutions for Organic and Amorphous Oxide TFTs
by: Benjamin Iniguez, et al.
Published: (2021-01-01)

Lead-Free Copper-Based Perovskite Nanonets for Deep Ultraviolet Photodetectors with High Stability and Better Performance
by: Shuhong Xu, et al.
Published: (2022-09-01)

Polysilicon-Channel Synaptic Transistors for Implementation of Short- and Long-Term Memory Characteristics
by: Myung-Hyun Baek, et al.
Published: (2023-08-01)

Fabrication of ordered nanoring arrays via the footprint of a polymer nanosphere monolayer
by: Zhao, Qin, et al.
Published: (2016)

Linear-Polyethyleneimine-Templated Synthesis of N-Doped Carbon Nanonet Flakes for High-performance Supercapacitor Electrodes
by: Dengchao Xia, et al.
Published: (2019-08-01)

Analysis and Optimization of Threshold Voltage Variability by Polysilicon Grain Size Simulation in 3D NAND Flash Memory
by: Tao Yang, et al.
Published: (2020-01-01)

Gradient and Scattering Forces on a Kerr Nanosphere
by: R. F. Pobre, et al.
Published: (2004-12-01)

A Review for Compact Model of Thin-Film Transistors (TFTs)
by: Nianduan Lu, et al.
Published: (2018-11-01)

Nanosphere Lithography for Structuring Polycrystalline Diamond Films
by: Mária Domonkos, et al.
Published: (2020-02-01)

Flexible IGZO TFTs and Their Suitability for Space Applications
by: Julio C. Costa, et al.
Published: (2019-01-01)

Electrical Stability of Solution-Processed a-IGZO TFTs Exposed to High-Humidity Ambient for Long Periods
by: Seung-Un Lee, et al.
Published: (2019-01-01)

Nanosphere Structures Using Various Materials: A Strategy for Signal Amplification for Virus Sensing
by: Sjaikhurrizal El Muttaqien, et al.
Published: (2022-12-01)

Fabricating ordered 2-D nano-structured arrays using nanosphere lithography
by: Chenlong Zhang, et al.
Published: (2017-01-01)

The Effect of Defect Charge and Parasitic Surface Conductance on Aluminum Nitride RF Filter Circuit Loss
by: Tian Xu, et al.
Published: (2023-02-01)

Enhancing the Stability and Mobility of TFTs via Indium–Tungsten Oxide and Zinc Oxide Engineered Heterojunction Channels Annealed in Oxygen Ambient
by: Seong-Hwan Lim, et al.
Published: (2024-07-01)

Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
by: Hyojung Kim, et al.
Published: (2021-04-01)

Effect of interface defects on electrical characteristics of a-ITGZO TFTs under bottom, top, and dual gatings
by: Mingu Kang, et al.
Published: (2024-07-01)

Synthesis and characterization of carbon nanospheres by catalytic CVD method
by: Kadhim Rashid Gbashi
Published: (2018-10-01)

Directed Self-Assembly of Polystyrene Nanospheres by Direct Laser-Writing Lithography
by: Eleonora Cara, et al.
Published: (2020-02-01)

Enhanced Reliability of a-IGZO TFTs with a Reduced Feature Size and a Clean Etch-Stopper Layer Structure
by: Jae-Moon Chung, et al.
Published: (2019-05-01)

Fabrication of Nickel Nanostructure Arrays Via a Modified Nanosphere Lithography
by: Wei Xueyong, et al.
Published: (2011-01-01)

Passivation of Poly-Si Thin Film Employing Si Self-Implantation and Its Application to TFTs
by: Rongsheng Chen, et al.
Published: (2018-01-01)

Properties and benefits of fluorine in silicon and silicon-germanium devices
by: Peter Ashbur, et al.
Published: (2023-06-01)

Self-Assembly Magnetic Micro- and Nanospheres and the Effect of Applied Magnetic Fields
by: Angelos Mourkas, et al.
Published: (2021-04-01)

Effect of Hydrogen on Long-Term Reliability of InZnO TFTs Characterized by Low-Frequency Noise
by: Ya-Yi Chen, et al.
Published: (2021-01-01)