A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The am...
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| Format: | Article |
| Language: | English |
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MDPI AG
2011-11-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/11/12/11112/ |
| _version_ | 1811187761169825792 |
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| author | Chyan-Chyi Wu Ching-Liang Dai Ming-Zhi Yang |
| author_facet | Chyan-Chyi Wu Ching-Liang Dai Ming-Zhi Yang |
| author_sort | Chyan-Chyi Wu |
| collection | DOAJ |
| description | A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature. |
| first_indexed | 2024-04-11T14:07:47Z |
| format | Article |
| id | doaj.art-2c7f838fa7584ac7958346b09a39f2b1 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T14:07:47Z |
| publishDate | 2011-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-2c7f838fa7584ac7958346b09a39f2b12022-12-22T04:19:49ZengMDPI AGSensors1424-82202011-11-011112111121112110.3390/s111211112A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-ChipChyan-Chyi WuChing-Liang DaiMing-Zhi YangA zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature.http://www.mdpi.com/1424-8220/11/12/11112/ammonia microsensorzinc oxide filmnanorodreadout circuit |
| spellingShingle | Chyan-Chyi Wu Ching-Liang Dai Ming-Zhi Yang A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip Sensors ammonia microsensor zinc oxide film nanorod readout circuit |
| title | A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip |
| title_full | A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip |
| title_fullStr | A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip |
| title_full_unstemmed | A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip |
| title_short | A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip |
| title_sort | zinc oxide nanorod ammonia microsensor integrated with a readout circuit on a chip |
| topic | ammonia microsensor zinc oxide film nanorod readout circuit |
| url | http://www.mdpi.com/1424-8220/11/12/11112/ |
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