Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint
Nanoimprint technology is powerful for fabricating nanostructures in a large area. However, expensive equipment, high cost, and complex process conditions hinder the application of nano-imprinting technology. Therefore, double-layer self-priming nanoimprint technology was proposed to fabricate order...
Main Authors: | Yue Su, Zhaoxin Geng, Weihao Fang, Xiaoqing Lv, Shicai Wang, Zhengtai Ma, Weihua Pei |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-01-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/2/121 |
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