Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams
A three-axis accelerometer with a double L-shaped beams structure was designed and fabricated in this paper, consisting of a supporting body, four double L-shaped beams and intermediate double beams connected to two mass blocks. When applying acceleration to the accelerometer chip, according to the...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-03-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/6/1780 |