A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators
This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single pr...
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| Format: | Article |
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MDPI AG
2021-03-01
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| Online Access: | https://www.mdpi.com/2072-666X/12/3/310 |
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| author | Muhammad Mubasher Saleem Shayaan Saghir Syed Ali Raza Bukhari Amir Hamza Rana Iqtidar Shakoor Shafaat Ahmed Bazaz |
| author_facet | Muhammad Mubasher Saleem Shayaan Saghir Syed Ali Raza Bukhari Amir Hamza Rana Iqtidar Shakoor Shafaat Ahmed Bazaz |
| author_sort | Muhammad Mubasher Saleem |
| collection | DOAJ |
| description | This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 <inline-formula>μ<math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mrow><mi mathvariant="sans-serif">μ</mi><mi mathvariant="normal">g</mi></mrow><mo>/</mo><msqrt><mrow><mi>Hz</mi></mrow></msqrt></mrow></semantics></math></inline-formula> and nonlinearity less than 0.5%. |
| first_indexed | 2024-03-10T13:10:47Z |
| format | Article |
| id | doaj.art-2dac4f41c6504c758a2f4687a5183c68 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T13:10:47Z |
| publishDate | 2021-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-2dac4f41c6504c758a2f4687a5183c682023-11-21T10:45:20ZengMDPI AGMicromachines2072-666X2021-03-0112331010.3390/mi12030310A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled ResonatorsMuhammad Mubasher Saleem0Shayaan Saghir1Syed Ali Raza Bukhari2Amir Hamza3Rana Iqtidar Shakoor4Shafaat Ahmed Bazaz5Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, PakistanDepartment of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, PakistanDepartment of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, PakistanDepartment of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, PakistanNational Centre of Robotics and Automation (NCRA), Islamabad 44000, PakistanNational Centre of Robotics and Automation (NCRA), Islamabad 44000, PakistanThis paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 <inline-formula>μ<math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mrow><mi mathvariant="sans-serif">μ</mi><mi mathvariant="normal">g</mi></mrow><mo>/</mo><msqrt><mrow><mi>Hz</mi></mrow></msqrt></mrow></semantics></math></inline-formula> and nonlinearity less than 0.5%.https://www.mdpi.com/2072-666X/12/3/310dynamic rangefinite-element-methodMEMS accelerometermode-localizationmode-aliasingnonlinearity |
| spellingShingle | Muhammad Mubasher Saleem Shayaan Saghir Syed Ali Raza Bukhari Amir Hamza Rana Iqtidar Shakoor Shafaat Ahmed Bazaz A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators Micromachines dynamic range finite-element-method MEMS accelerometer mode-localization mode-aliasing nonlinearity |
| title | A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators |
| title_full | A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators |
| title_fullStr | A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators |
| title_full_unstemmed | A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators |
| title_short | A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators |
| title_sort | low g mems accelerometer with high sensitivity low nonlinearity and large dynamic range based on mode localization of 3 dof weakly coupled resonators |
| topic | dynamic range finite-element-method MEMS accelerometer mode-localization mode-aliasing nonlinearity |
| url | https://www.mdpi.com/2072-666X/12/3/310 |
| work_keys_str_mv | AT muhammadmubashersaleem alowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT shayaansaghir alowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT syedalirazabukhari alowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT amirhamza alowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT ranaiqtidarshakoor alowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT shafaatahmedbazaz alowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT muhammadmubashersaleem lowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT shayaansaghir lowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT syedalirazabukhari lowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT amirhamza lowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT ranaiqtidarshakoor lowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators AT shafaatahmedbazaz lowgmemsaccelerometerwithhighsensitivitylownonlinearityandlargedynamicrangebasedonmodelocalizationof3dofweaklycoupledresonators |