Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2015-07-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/15/7/17313 |
| _version_ | 1811300856512905216 |
|---|---|
| author | Dengpeng Yuan Ying Dong Yujin Liu Tianjian Li |
| author_facet | Dengpeng Yuan Ying Dong Yujin Liu Tianjian Li |
| author_sort | Dengpeng Yuan |
| collection | DOAJ |
| description | Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors’ output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm−1. For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10−7 RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10−5 RIU can be detected by the SPR sensor array. |
| first_indexed | 2024-04-13T06:58:40Z |
| format | Article |
| id | doaj.art-2ddd495c1b824faf8893ed62b790be10 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T06:58:40Z |
| publishDate | 2015-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-2ddd495c1b824faf8893ed62b790be102022-12-22T02:57:11ZengMDPI AGSensors1424-82202015-07-01157173131732810.3390/s150717313s150717313Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide ArrayDengpeng Yuan0Ying Dong1Yujin Liu2Tianjian Li3Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, ChinaGraduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, ChinaGraduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, ChinaGraduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, ChinaBased on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors’ output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm−1. For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10−7 RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10−5 RIU can be detected by the SPR sensor array.http://www.mdpi.com/1424-8220/15/7/17313surface plasmon resonance (SPR)silicon-on-insulator (SOI)biochemical sensorrib waveguidefinite-difference time-domain (FDTD) method |
| spellingShingle | Dengpeng Yuan Ying Dong Yujin Liu Tianjian Li Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array Sensors surface plasmon resonance (SPR) silicon-on-insulator (SOI) biochemical sensor rib waveguide finite-difference time-domain (FDTD) method |
| title | Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array |
| title_full | Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array |
| title_fullStr | Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array |
| title_full_unstemmed | Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array |
| title_short | Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array |
| title_sort | design of a high performance micro integrated surface plasmon resonance sensor based on silicon on insulator rib waveguide array |
| topic | surface plasmon resonance (SPR) silicon-on-insulator (SOI) biochemical sensor rib waveguide finite-difference time-domain (FDTD) method |
| url | http://www.mdpi.com/1424-8220/15/7/17313 |
| work_keys_str_mv | AT dengpengyuan designofahighperformancemicrointegratedsurfaceplasmonresonancesensorbasedonsilicononinsulatorribwaveguidearray AT yingdong designofahighperformancemicrointegratedsurfaceplasmonresonancesensorbasedonsilicononinsulatorribwaveguidearray AT yujinliu designofahighperformancemicrointegratedsurfaceplasmonresonancesensorbasedonsilicononinsulatorribwaveguidearray AT tianjianli designofahighperformancemicrointegratedsurfaceplasmonresonancesensorbasedonsilicononinsulatorribwaveguidearray |