The Role of Annealing on Properties of Silicon Films Deposited By EB-PVD
The structural and optical properties of polycrystalline silicon films obtained on a silicon wafer by electron beam physical vapor deposition (EBPVD), were studied in this paper. These films were initially amorphous and changed to a crystalline solid phase during annealing. Annealing was performed i...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | fas |
| Published: |
Isfahan University of Technology
2020-05-01
|
| Series: | Journal of Advanced Materials in Engineering |
| Subjects: | |
| Online Access: | http://jame.iut.ac.ir/article-1-904-en.html |
| _version_ | 1818624251237761024 |
|---|---|
| author | M. Zarchi Sh. Ahangarani |
| author_facet | M. Zarchi Sh. Ahangarani |
| author_sort | M. Zarchi |
| collection | DOAJ |
| description | The structural and optical properties of polycrystalline silicon films obtained on a silicon wafer by electron beam physical vapor deposition (EBPVD), were studied in this paper. These films were initially amorphous and changed to a crystalline solid phase during annealing. Annealing was performed in an inert gas atmosphere tube furnace at different temperatures. Micro-structure of the films was analyzed to know the relationship between the crystalline / amorphous composition, grain size and characteristics of the films. The results showed a decrease in roughness with increasing annealing temperature and structural density. Moreover, results of Micro-Raman spectrum showed formation and increase of silicon nanocrystals in the annealed condition when the thickness of the coating increased due to structural defects. |
| first_indexed | 2024-12-16T18:53:59Z |
| format | Article |
| id | doaj.art-2e166cc96da2438d8d6d114e7bb65a8b |
| institution | Directory Open Access Journal |
| issn | 2251-600X 2423-5733 |
| language | fas |
| last_indexed | 2024-12-16T18:53:59Z |
| publishDate | 2020-05-01 |
| publisher | Isfahan University of Technology |
| record_format | Article |
| series | Journal of Advanced Materials in Engineering |
| spelling | doaj.art-2e166cc96da2438d8d6d114e7bb65a8b2022-12-21T22:20:35ZfasIsfahan University of TechnologyJournal of Advanced Materials in Engineering2251-600X2423-57332020-05-0139199103The Role of Annealing on Properties of Silicon Films Deposited By EB-PVDM. Zarchi0Sh. Ahangarani1 Advanced Materials & Renewable Energies Department, Iranian Research Organization for Science and Technology, Tehran, Iran. Advanced Materials & Renewable Energies Department, Iranian Research Organization for Science and Technology, Tehran, Iran. The structural and optical properties of polycrystalline silicon films obtained on a silicon wafer by electron beam physical vapor deposition (EBPVD), were studied in this paper. These films were initially amorphous and changed to a crystalline solid phase during annealing. Annealing was performed in an inert gas atmosphere tube furnace at different temperatures. Micro-structure of the films was analyzed to know the relationship between the crystalline / amorphous composition, grain size and characteristics of the films. The results showed a decrease in roughness with increasing annealing temperature and structural density. Moreover, results of Micro-Raman spectrum showed formation and increase of silicon nanocrystals in the annealed condition when the thickness of the coating increased due to structural defects.http://jame.iut.ac.ir/article-1-904-en.htmlannealingamorphous siliconebpvdsurface morphologynano-crystal |
| spellingShingle | M. Zarchi Sh. Ahangarani The Role of Annealing on Properties of Silicon Films Deposited By EB-PVD Journal of Advanced Materials in Engineering annealing amorphous silicon ebpvd surface morphology nano-crystal |
| title | The Role of Annealing on Properties of Silicon Films Deposited By EB-PVD |
| title_full | The Role of Annealing on Properties of Silicon Films Deposited By EB-PVD |
| title_fullStr | The Role of Annealing on Properties of Silicon Films Deposited By EB-PVD |
| title_full_unstemmed | The Role of Annealing on Properties of Silicon Films Deposited By EB-PVD |
| title_short | The Role of Annealing on Properties of Silicon Films Deposited By EB-PVD |
| title_sort | role of annealing on properties of silicon films deposited by eb pvd |
| topic | annealing amorphous silicon ebpvd surface morphology nano-crystal |
| url | http://jame.iut.ac.ir/article-1-904-en.html |
| work_keys_str_mv | AT mzarchi theroleofannealingonpropertiesofsiliconfilmsdepositedbyebpvd AT shahangarani theroleofannealingonpropertiesofsiliconfilmsdepositedbyebpvd AT mzarchi roleofannealingonpropertiesofsiliconfilmsdepositedbyebpvd AT shahangarani roleofannealingonpropertiesofsiliconfilmsdepositedbyebpvd |