Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes
Micro-optical gyroscopes (MOGs) are a type of high-accuracy gyroscope, which have the advantages of miniaturization, low cost, and satisfactory operating power. The quality factor (Q) of the waveguide ring resonators (WRRs) is very important to the performance of MOGs. This paper reviews various MOG...
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| Format: | Article |
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MDPI AG
2020-10-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/7/4/96 |
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| author | Zuo Feng Yuming He Wei Yan Fuhua Yang Weihua Han Zhaofeng Li |
| author_facet | Zuo Feng Yuming He Wei Yan Fuhua Yang Weihua Han Zhaofeng Li |
| author_sort | Zuo Feng |
| collection | DOAJ |
| description | Micro-optical gyroscopes (MOGs) are a type of high-accuracy gyroscope, which have the advantages of miniaturization, low cost, and satisfactory operating power. The quality factor (Q) of the waveguide ring resonators (WRRs) is very important to the performance of MOGs. This paper reviews various MOGs using WRRs made from different materials, including silica, indium phosphide, calcium fluoride, and polymer WRRs. The different architectures of the MOGs are reviewed, such as double-ring resonator MOGs and multiple-ring resonator MOGs. Candidate high-Q WRRs for MOGs, including silicon nitride, lithium niobite, calcium fluoride, and magnesium fluoride WRRs, are also reviewed. The manufacturing process, Q, and integration density values are compared. Summarizing the advanced WRRs and calculating the shot-noise-limited sensitivity are helpful processes in selecting suitable materials to fabricate MOGs. |
| first_indexed | 2024-03-10T15:20:30Z |
| format | Article |
| id | doaj.art-2e2a68f73f304f2c93d89d6f65c856ee |
| institution | Directory Open Access Journal |
| issn | 2304-6732 |
| language | English |
| last_indexed | 2024-03-10T15:20:30Z |
| publishDate | 2020-10-01 |
| publisher | MDPI AG |
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| series | Photonics |
| spelling | doaj.art-2e2a68f73f304f2c93d89d6f65c856ee2023-11-20T18:32:04ZengMDPI AGPhotonics2304-67322020-10-01749610.3390/photonics7040096Progress of Waveguide Ring Resonators Used in Micro-Optical GyroscopesZuo Feng0Yuming He1Wei Yan2Fuhua Yang3Weihua Han4Zhaofeng Li5Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaEngineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaEngineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaEngineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaEngineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaEngineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaMicro-optical gyroscopes (MOGs) are a type of high-accuracy gyroscope, which have the advantages of miniaturization, low cost, and satisfactory operating power. The quality factor (Q) of the waveguide ring resonators (WRRs) is very important to the performance of MOGs. This paper reviews various MOGs using WRRs made from different materials, including silica, indium phosphide, calcium fluoride, and polymer WRRs. The different architectures of the MOGs are reviewed, such as double-ring resonator MOGs and multiple-ring resonator MOGs. Candidate high-Q WRRs for MOGs, including silicon nitride, lithium niobite, calcium fluoride, and magnesium fluoride WRRs, are also reviewed. The manufacturing process, Q, and integration density values are compared. Summarizing the advanced WRRs and calculating the shot-noise-limited sensitivity are helpful processes in selecting suitable materials to fabricate MOGs.https://www.mdpi.com/2304-6732/7/4/96micro-optical gyroscopeswaveguide ring resonatorsQ factors |
| spellingShingle | Zuo Feng Yuming He Wei Yan Fuhua Yang Weihua Han Zhaofeng Li Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes Photonics micro-optical gyroscopes waveguide ring resonators Q factors |
| title | Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes |
| title_full | Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes |
| title_fullStr | Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes |
| title_full_unstemmed | Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes |
| title_short | Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes |
| title_sort | progress of waveguide ring resonators used in micro optical gyroscopes |
| topic | micro-optical gyroscopes waveguide ring resonators Q factors |
| url | https://www.mdpi.com/2304-6732/7/4/96 |
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