Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer

This paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sputtered on a silicon dioxide wafer patterned with ph...

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Bibliographic Details
Main Authors: Yonghyeon Kim, Hyeokjoo Choi, Seokhun Kwon, Seokwon Lee, Hyunil Kang, Wonseok Choi
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Energies
Subjects:
Online Access:https://www.mdpi.com/1996-1073/14/11/3217
Description
Summary:This paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sputtered on a silicon dioxide wafer patterned with photoresist via a RF magnetron sputtering system. The RF power ratios applied to the 4 inch target of Ni and Cr were 300 W:100 W (3:1), 300 W:150 W (2:1), and 150 W:150 W (1:1). The electrical resistance of the manufactured microconstruction was calculated and measured through Hall measurements. The temperature generated by applying 1–10 V to the microconstruction electrode was observed by using an infrared camera, and was summarized using a linear equation according to the power applied to each sample.
ISSN:1996-1073