Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer
This paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sputtered on a silicon dioxide wafer patterned with ph...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-05-01
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| Series: | Energies |
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| Online Access: | https://www.mdpi.com/1996-1073/14/11/3217 |
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| author | Yonghyeon Kim Hyeokjoo Choi Seokhun Kwon Seokwon Lee Hyunil Kang Wonseok Choi |
| author_facet | Yonghyeon Kim Hyeokjoo Choi Seokhun Kwon Seokwon Lee Hyunil Kang Wonseok Choi |
| author_sort | Yonghyeon Kim |
| collection | DOAJ |
| description | This paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sputtered on a silicon dioxide wafer patterned with photoresist via a RF magnetron sputtering system. The RF power ratios applied to the 4 inch target of Ni and Cr were 300 W:100 W (3:1), 300 W:150 W (2:1), and 150 W:150 W (1:1). The electrical resistance of the manufactured microconstruction was calculated and measured through Hall measurements. The temperature generated by applying 1–10 V to the microconstruction electrode was observed by using an infrared camera, and was summarized using a linear equation according to the power applied to each sample. |
| first_indexed | 2024-03-10T10:50:34Z |
| format | Article |
| id | doaj.art-2e47f2ea8de44d20a8de4f3fa40df025 |
| institution | Directory Open Access Journal |
| issn | 1996-1073 |
| language | English |
| last_indexed | 2024-03-10T10:50:34Z |
| publishDate | 2021-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Energies |
| spelling | doaj.art-2e47f2ea8de44d20a8de4f3fa40df0252023-11-21T22:15:53ZengMDPI AGEnergies1996-10732021-05-011411321710.3390/en14113217Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy LayerYonghyeon Kim0Hyeokjoo Choi1Seokhun Kwon2Seokwon Lee3Hyunil Kang4Wonseok Choi5Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, KoreaDepartment of Electrical Engineering, Hanbat National University, Daejeon 34158, KoreaDepartment of Electrical Engineering, Hanbat National University, Daejeon 34158, KoreaDepartment of Electrical Engineering, Hanbat National University, Daejeon 34158, KoreaDepartment of Electrical Engineering, Hanbat National University, Daejeon 34158, KoreaDepartment of Electrical Engineering, Hanbat National University, Daejeon 34158, KoreaThis paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sputtered on a silicon dioxide wafer patterned with photoresist via a RF magnetron sputtering system. The RF power ratios applied to the 4 inch target of Ni and Cr were 300 W:100 W (3:1), 300 W:150 W (2:1), and 150 W:150 W (1:1). The electrical resistance of the manufactured microconstruction was calculated and measured through Hall measurements. The temperature generated by applying 1–10 V to the microconstruction electrode was observed by using an infrared camera, and was summarized using a linear equation according to the power applied to each sample.https://www.mdpi.com/1996-1073/14/11/3217co-sputteringmicroconstructionRF powernickel/chromium alloy |
| spellingShingle | Yonghyeon Kim Hyeokjoo Choi Seokhun Kwon Seokwon Lee Hyunil Kang Wonseok Choi Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer Energies co-sputtering microconstruction RF power nickel/chromium alloy |
| title | Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer |
| title_full | Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer |
| title_fullStr | Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer |
| title_full_unstemmed | Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer |
| title_short | Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer |
| title_sort | thermal analysis of energy storage capacity according to thickness of nickel chromium alloy layer |
| topic | co-sputtering microconstruction RF power nickel/chromium alloy |
| url | https://www.mdpi.com/1996-1073/14/11/3217 |
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