Characterization of Mn<sub>5</sub>Ge<sub>3</sub> Contacts on a Shallow Ge/SiGe Heterostructure

Characterization of Mn<sub>5</sub>Ge<sub>3</sub> Contacts on a Shallow Ge/SiGe Heterostructure

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Bibliographic Details
Main Authors:	Troy A. Hutchins-Delgado, Sadhvikas J. Addamane, Ping Lu, Tzu-Ming Lu
Format:	Article
Language:	English
Published:	MDPI AG 2024-03-01
Series:	Nanomaterials
Subjects:	Mn5Ge3 Ge/SiGe thin film germanide phase formation solid-state synthesis
Online Access:	https://www.mdpi.com/2079-4991/14/6/539

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