Experimental Study on Fabrication of CVD Diamond Micro Milling Tool by Picosecond Pulsed Laser

Because of the many advantages of high-precision micromachining, picosecond pulsed lasers (PSPLs) can be used to process chemical-vapor-deposited diamonds (CVD-D). With the appropriate PSPL manufacturing technique, sharp and smooth edges of CVD-D micro tools can be generated. In this study, a PSPL i...

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Bibliographic Details
Main Authors: Yi Xia, Ning He, Liang Li, Guolong Zhao
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/12/9/1058
Description
Summary:Because of the many advantages of high-precision micromachining, picosecond pulsed lasers (PSPLs) can be used to process chemical-vapor-deposited diamonds (CVD-D). With the appropriate PSPL manufacturing technique, sharp and smooth edges of CVD-D micro tools can be generated. In this study, a PSPL is used to cut CVD-D. To optimize PSPL cutting, the effects of its parameters including fluence, pulse pitch, and wavelength on the cutting results were investigated. The results showed that the wavelength had the greatest impact on the sharpness of CVD-D. With PSPL cutting, sharp cutting edges, and smooth fabricated surfaces of the CVD-D, micro tools were achieved. Finally, the fabrication of CVD-D micro milling tools and micro milling experiments were also demonstrated.
ISSN:2072-666X