Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method
In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the ge...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-12-01
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| Series: | Crystals |
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| Online Access: | https://www.mdpi.com/2073-4352/13/12/1659 |
| _version_ | 1797381439274090496 |
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| author | Xia Tang Gagan Kumar Chappa Lucas Vieira Martin Holena Natasha Dropka |
| author_facet | Xia Tang Gagan Kumar Chappa Lucas Vieira Martin Holena Natasha Dropka |
| author_sort | Xia Tang |
| collection | DOAJ |
| description | In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the geometry and material parameters of the hot zone (crucible, heaters, radiation shield, and crystal), as well as the process parameters (such as pulling and rotation rates, heating power, etc.). Voronkov criteria (v/G<sub>n</sub>), interface deflection, and the average interface temperature gradient were selected as the output parameters. We carried out a correlation analysis between the variables and used decision trees to study the impact of the 13 input variables on the output variables. The results indicated that in the growth of gallium arsenide, the main factor affecting interface deflection and the average interface thermal gradients is the crucible rotation rate. For v/G<sub>n</sub>, it is the pulling rate. |
| first_indexed | 2024-03-08T20:52:31Z |
| format | Article |
| id | doaj.art-2ec1edbe1b174d22914def49a25a215f |
| institution | Directory Open Access Journal |
| issn | 2073-4352 |
| language | English |
| last_indexed | 2024-03-08T20:52:31Z |
| publishDate | 2023-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Crystals |
| spelling | doaj.art-2ec1edbe1b174d22914def49a25a215f2023-12-22T14:01:54ZengMDPI AGCrystals2073-43522023-12-011312165910.3390/cryst13121659Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC MethodXia Tang0Gagan Kumar Chappa1Lucas Vieira2Martin Holena3Natasha Dropka4Leibniz-Institut für Kristallzüchtung, Max-Born-Str. 2, 12489 Berlin, GermanyLeibniz-Institut für Kristallzüchtung, Max-Born-Str. 2, 12489 Berlin, GermanyLeibniz-Institut für Kristallzüchtung, Max-Born-Str. 2, 12489 Berlin, GermanyLeibniz Institute for Catalysis, Albert-Einstein-Str. 29A, 18069 Rostock, GermanyLeibniz-Institut für Kristallzüchtung, Max-Born-Str. 2, 12489 Berlin, GermanyIn this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the geometry and material parameters of the hot zone (crucible, heaters, radiation shield, and crystal), as well as the process parameters (such as pulling and rotation rates, heating power, etc.). Voronkov criteria (v/G<sub>n</sub>), interface deflection, and the average interface temperature gradient were selected as the output parameters. We carried out a correlation analysis between the variables and used decision trees to study the impact of the 13 input variables on the output variables. The results indicated that in the growth of gallium arsenide, the main factor affecting interface deflection and the average interface thermal gradients is the crucible rotation rate. For v/G<sub>n</sub>, it is the pulling rate.https://www.mdpi.com/2073-4352/13/12/1659LEC growthgallium arsenideCFDregression tree |
| spellingShingle | Xia Tang Gagan Kumar Chappa Lucas Vieira Martin Holena Natasha Dropka Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method Crystals LEC growth gallium arsenide CFD regression tree |
| title | Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method |
| title_full | Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method |
| title_fullStr | Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method |
| title_full_unstemmed | Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method |
| title_short | Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method |
| title_sort | decision tree supported analysis of gallium arsenide growth using the lec method |
| topic | LEC growth gallium arsenide CFD regression tree |
| url | https://www.mdpi.com/2073-4352/13/12/1659 |
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