Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method

Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method

In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the ge...

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Bibliographic Details
Main Authors: Xia Tang, Gagan Kumar Chappa, Lucas Vieira, Martin Holena, Natasha Dropka
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Crystals
Subjects:
LEC growth
gallium arsenide
CFD
regression tree
Online Access:https://www.mdpi.com/2073-4352/13/12/1659

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