In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum

In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum

Recent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds. The original approach used here is termed focused-electron-beam-induced mass spectrometry (FEBiMS)....

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Bibliographic Details
Main Authors: Jakub Jurczyk, Lex Pillatsch, Luisa Berger, Agnieszka Priebe, Katarzyna Madajska, Czesław Kapusta, Iwona B. Szymańska, Johann Michler, Ivo Utke
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Nanomaterials
Subjects:
ion extractor
mass spectrometry
electron induced fragmentation
lithography
TOFSIMS (Time-of-flight secondary ions mass spectrometry)
FEBiMS
Online Access:https://www.mdpi.com/2079-4991/12/15/2710

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