Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing

Imaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Th...

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Main Authors: Adrian Zakrzewski, Piotr Jurewicz, Michał Ćwikła, Piotr Koruba, Jacek Reiner
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/21/1/8
_version_ 1797543902577688576
author Adrian Zakrzewski
Piotr Jurewicz
Michał Ćwikła
Piotr Koruba
Jacek Reiner
author_facet Adrian Zakrzewski
Piotr Jurewicz
Michał Ćwikła
Piotr Koruba
Jacek Reiner
author_sort Adrian Zakrzewski
collection DOAJ
description Imaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Therefore, we propose an approach for reconstruction of the reflection distribution based on a series of measurements at different illumination angles and extrapolation of the missing results to overcome this limitation. The developed algorithm was validated using bidirectional transmittance distribution function (BTDF) measurements. The BRDF measurements were carried out for materials that are commonly used in laser material processing, i.e. substrates and functional coatings. The obtained data were subsequently used to determine the total reflection intensity from all considered materials, which were characterized by reconstructed distributions.
first_indexed 2024-03-10T13:52:04Z
format Article
id doaj.art-2ee8ee6bb7014fdeb43bbac91bc797cd
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-03-10T13:52:04Z
publishDate 2020-12-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-2ee8ee6bb7014fdeb43bbac91bc797cd2023-11-21T02:01:46ZengMDPI AGSensors1424-82202020-12-01211810.3390/s21010008Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material ProcessingAdrian Zakrzewski0Piotr Jurewicz1Michał Ćwikła2Piotr Koruba3Jacek Reiner4Faculty of Mechanical Engineering, Wrocław University of Science and Technology, Wybrzeże Stanisława Wyspiańskiego 27, 50-370 Wrocław, PolandFaculty of Mechanical Engineering, Wrocław University of Science and Technology, Wybrzeże Stanisława Wyspiańskiego 27, 50-370 Wrocław, PolandFaculty of Mechanical Engineering, Wrocław University of Science and Technology, Wybrzeże Stanisława Wyspiańskiego 27, 50-370 Wrocław, PolandFaculty of Mechanical Engineering, Wrocław University of Science and Technology, Wybrzeże Stanisława Wyspiańskiego 27, 50-370 Wrocław, PolandFaculty of Mechanical Engineering, Wrocław University of Science and Technology, Wybrzeże Stanisława Wyspiańskiego 27, 50-370 Wrocław, PolandImaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Therefore, we propose an approach for reconstruction of the reflection distribution based on a series of measurements at different illumination angles and extrapolation of the missing results to overcome this limitation. The developed algorithm was validated using bidirectional transmittance distribution function (BTDF) measurements. The BRDF measurements were carried out for materials that are commonly used in laser material processing, i.e. substrates and functional coatings. The obtained data were subsequently used to determine the total reflection intensity from all considered materials, which were characterized by reconstructed distributions.https://www.mdpi.com/1424-8220/21/1/8imaging scatterometryBRDF reconstructionreflection distribution
spellingShingle Adrian Zakrzewski
Piotr Jurewicz
Michał Ćwikła
Piotr Koruba
Jacek Reiner
Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing
Sensors
imaging scatterometry
BRDF reconstruction
reflection distribution
title Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing
title_full Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing
title_fullStr Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing
title_full_unstemmed Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing
title_short Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing
title_sort imaging scatterometry with extrapolation of missing brdf data for materials used in laser material processing
topic imaging scatterometry
BRDF reconstruction
reflection distribution
url https://www.mdpi.com/1424-8220/21/1/8
work_keys_str_mv AT adrianzakrzewski imagingscatterometrywithextrapolationofmissingbrdfdataformaterialsusedinlasermaterialprocessing
AT piotrjurewicz imagingscatterometrywithextrapolationofmissingbrdfdataformaterialsusedinlasermaterialprocessing
AT michałcwikła imagingscatterometrywithextrapolationofmissingbrdfdataformaterialsusedinlasermaterialprocessing
AT piotrkoruba imagingscatterometrywithextrapolationofmissingbrdfdataformaterialsusedinlasermaterialprocessing
AT jacekreiner imagingscatterometrywithextrapolationofmissingbrdfdataformaterialsusedinlasermaterialprocessing