Resonant-tunneling-diode terahertz oscillator with a cylindrical cavity for high-frequency oscillation

We proposed and fabricated resonant-tunneling-diode (RTD) terahertz oscillators integrated with a cylindrical cavity. Oscillation frequency of 3 THz is expected from theoretical analysis. As a preliminary experiment, the proposed oscillator was fabricated using electron-beam lithography with a three...

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Main Authors: Ryunosuke Izumi, Takumi Sato, Safumi Suzuki, Masahiro Asada
Format: Article
Language:English
Published: AIP Publishing LLC 2019-08-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5114963
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author Ryunosuke Izumi
Takumi Sato
Safumi Suzuki
Masahiro Asada
author_facet Ryunosuke Izumi
Takumi Sato
Safumi Suzuki
Masahiro Asada
author_sort Ryunosuke Izumi
collection DOAJ
description We proposed and fabricated resonant-tunneling-diode (RTD) terahertz oscillators integrated with a cylindrical cavity. Oscillation frequency of 3 THz is expected from theoretical analysis. As a preliminary experiment, the proposed oscillator was fabricated using electron-beam lithography with a three-layer-resist process. An oscillation of up to 1.79 THz was obtained in the fabricated oscillators, which was lower than the theoretical expectation. This was because of a parasitic capacitance of the metal post connecting the cavity and the RTD. Theoretical calculations, including this parasitic capacitance, agreed well with the experiment. The parasitic capacitance can be suppressed by adding a simple process to the cavity fabrication.
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spelling doaj.art-2f034ad18cb74d54b63f76b677e2afed2022-12-21T18:43:53ZengAIP Publishing LLCAIP Advances2158-32262019-08-0198085020085020-610.1063/1.5114963074908ADVResonant-tunneling-diode terahertz oscillator with a cylindrical cavity for high-frequency oscillationRyunosuke Izumi0Takumi Sato1Safumi Suzuki2Masahiro Asada3Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Tokyo 152-8552, JapanDepartment of Electrical and Electronic Engineering, Tokyo Institute of Technology, Tokyo 152-8552, JapanDepartment of Electrical and Electronic Engineering, Tokyo Institute of Technology, Tokyo 152-8552, JapanInstitute of Innovative Research, Tokyo Institute of Technology, Tokyo 152-8552, JapanWe proposed and fabricated resonant-tunneling-diode (RTD) terahertz oscillators integrated with a cylindrical cavity. Oscillation frequency of 3 THz is expected from theoretical analysis. As a preliminary experiment, the proposed oscillator was fabricated using electron-beam lithography with a three-layer-resist process. An oscillation of up to 1.79 THz was obtained in the fabricated oscillators, which was lower than the theoretical expectation. This was because of a parasitic capacitance of the metal post connecting the cavity and the RTD. Theoretical calculations, including this parasitic capacitance, agreed well with the experiment. The parasitic capacitance can be suppressed by adding a simple process to the cavity fabrication.http://dx.doi.org/10.1063/1.5114963
spellingShingle Ryunosuke Izumi
Takumi Sato
Safumi Suzuki
Masahiro Asada
Resonant-tunneling-diode terahertz oscillator with a cylindrical cavity for high-frequency oscillation
AIP Advances
title Resonant-tunneling-diode terahertz oscillator with a cylindrical cavity for high-frequency oscillation
title_full Resonant-tunneling-diode terahertz oscillator with a cylindrical cavity for high-frequency oscillation
title_fullStr Resonant-tunneling-diode terahertz oscillator with a cylindrical cavity for high-frequency oscillation
title_full_unstemmed Resonant-tunneling-diode terahertz oscillator with a cylindrical cavity for high-frequency oscillation
title_short Resonant-tunneling-diode terahertz oscillator with a cylindrical cavity for high-frequency oscillation
title_sort resonant tunneling diode terahertz oscillator with a cylindrical cavity for high frequency oscillation
url http://dx.doi.org/10.1063/1.5114963
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