Amorphous Dielectric Thin Films with Extremely Low Mechanical Loss

Amorphous Dielectric Thin Films with Extremely Low Mechanical Loss

The ubiquitous low-energy excitations are one of the universal phenomena of amorphous solids. These excitations dominate the acoustic, dielectric, and thermal properties of structurally disordered solids. One exception has been a type of hydrogenated amorphous silicon (a-Si:H) with 1 at.% H. Using l...

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Bibliographic Details
Main Authors: Liu X., Queen D.R., Metcalf T.H., Karel J.E., Hellman F.
Format: Article
Language:English
Published: Polish Academy of Sciences 2015-04-01
Series:Archives of Metallurgy and Materials
Subjects:
Internal friction
amorphous silicon
elastic modulus
speed of sound
tunneling systems
Online Access:http://www.degruyter.com/view/j/amm.2015.60.issue-1/amm-2015-0059/amm-2015-0059.xml?format=INT

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