System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement Unit

Errors compensation of micromachined-inertial-measurement-units (MIMU) is essential in practical applications. This paper presents a new compensation method using a neural-network-based identification for MIMU, which capably solves the universal problems of cross-coupling, misalignment, eccentricity...

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Main Authors: Shi Qiang Liu, Rong Zhu
Format: Article
Language:English
Published: MDPI AG 2016-01-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/16/2/175
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author Shi Qiang Liu
Rong Zhu
author_facet Shi Qiang Liu
Rong Zhu
author_sort Shi Qiang Liu
collection DOAJ
description Errors compensation of micromachined-inertial-measurement-units (MIMU) is essential in practical applications. This paper presents a new compensation method using a neural-network-based identification for MIMU, which capably solves the universal problems of cross-coupling, misalignment, eccentricity, and other deterministic errors existing in a three-dimensional integrated system. Using a neural network to model a complex multivariate and nonlinear coupling system, the errors could be readily compensated through a comprehensive calibration. In this paper, we also present a thermal-gas MIMU based on thermal expansion, which measures three-axis angular rates and three-axis accelerations using only three thermal-gas inertial sensors, each of which capably measures one-axis angular rate and one-axis acceleration simultaneously in one chip. The developed MIMU (100 × 100 × 100 mm3) possesses the advantages of simple structure, high shock resistance, and large measuring ranges (three-axes angular rates of ±4000°/s and three-axes accelerations of ±10 g) compared with conventional MIMU, due to using gas medium instead of mechanical proof mass as the key moving and sensing elements. However, the gas MIMU suffers from cross-coupling effects, which corrupt the system accuracy. The proposed compensation method is, therefore, applied to compensate the system errors of the MIMU. Experiments validate the effectiveness of the compensation, and the measurement errors of three-axis angular rates and three-axis accelerations are reduced to less than 1% and 3% of uncompensated errors in the rotation range of ±600°/s and the acceleration range of ±1 g, respectively.
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spelling doaj.art-300c0bca11dd4f0f835b0f8f714622a02022-12-22T04:27:29ZengMDPI AGSensors1424-82202016-01-0116217510.3390/s16020175s16020175System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement UnitShi Qiang Liu0Rong Zhu1State Key Laboratory of Precision Measurement Technology and Instrument, Department of Precision Instruments, Tsinghua University, Beijing 100084, ChinaState Key Laboratory of Precision Measurement Technology and Instrument, Department of Precision Instruments, Tsinghua University, Beijing 100084, ChinaErrors compensation of micromachined-inertial-measurement-units (MIMU) is essential in practical applications. This paper presents a new compensation method using a neural-network-based identification for MIMU, which capably solves the universal problems of cross-coupling, misalignment, eccentricity, and other deterministic errors existing in a three-dimensional integrated system. Using a neural network to model a complex multivariate and nonlinear coupling system, the errors could be readily compensated through a comprehensive calibration. In this paper, we also present a thermal-gas MIMU based on thermal expansion, which measures three-axis angular rates and three-axis accelerations using only three thermal-gas inertial sensors, each of which capably measures one-axis angular rate and one-axis acceleration simultaneously in one chip. The developed MIMU (100 × 100 × 100 mm3) possesses the advantages of simple structure, high shock resistance, and large measuring ranges (three-axes angular rates of ±4000°/s and three-axes accelerations of ±10 g) compared with conventional MIMU, due to using gas medium instead of mechanical proof mass as the key moving and sensing elements. However, the gas MIMU suffers from cross-coupling effects, which corrupt the system accuracy. The proposed compensation method is, therefore, applied to compensate the system errors of the MIMU. Experiments validate the effectiveness of the compensation, and the measurement errors of three-axis angular rates and three-axis accelerations are reduced to less than 1% and 3% of uncompensated errors in the rotation range of ±600°/s and the acceleration range of ±1 g, respectively.http://www.mdpi.com/1424-8220/16/2/175micromachined inertial measurement unitinertial sensorthermal gas sensorerror compensationneural network
spellingShingle Shi Qiang Liu
Rong Zhu
System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement Unit
Sensors
micromachined inertial measurement unit
inertial sensor
thermal gas sensor
error compensation
neural network
title System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement Unit
title_full System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement Unit
title_fullStr System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement Unit
title_full_unstemmed System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement Unit
title_short System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement Unit
title_sort system error compensation methodology based on a neural network for a micromachined inertial measurement unit
topic micromachined inertial measurement unit
inertial sensor
thermal gas sensor
error compensation
neural network
url http://www.mdpi.com/1424-8220/16/2/175
work_keys_str_mv AT shiqiangliu systemerrorcompensationmethodologybasedonaneuralnetworkforamicromachinedinertialmeasurementunit
AT rongzhu systemerrorcompensationmethodologybasedonaneuralnetworkforamicromachinedinertialmeasurementunit