Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices
The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) gas sensors is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors in comparison wi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201820704003 |
| _version_ | 1818445088558153728 |
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| author | Samotaev Nikolay Oblov Konstantin Ivanova Anastasia |
| author_facet | Samotaev Nikolay Oblov Konstantin Ivanova Anastasia |
| author_sort | Samotaev Nikolay |
| collection | DOAJ |
| description | The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) gas sensors is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors in comparison with classical clean room technologies using for mass production MEMS devices. The main technical factors affecting on using MOX sensors in various applications are presented. Current results demonstrate that using described technology possible to manufacturing all parts of MOX gas sensor in the SMD form-factor SOT-23 package type. |
| first_indexed | 2024-12-14T19:26:16Z |
| format | Article |
| id | doaj.art-301326d6ad8d46bbbd4e6b1a9c931645 |
| institution | Directory Open Access Journal |
| issn | 2261-236X |
| language | English |
| last_indexed | 2024-12-14T19:26:16Z |
| publishDate | 2018-01-01 |
| publisher | EDP Sciences |
| record_format | Article |
| series | MATEC Web of Conferences |
| spelling | doaj.art-301326d6ad8d46bbbd4e6b1a9c9316452022-12-21T22:50:12ZengEDP SciencesMATEC Web of Conferences2261-236X2018-01-012070400310.1051/matecconf/201820704003matecconf_icmmpm2018_04003Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devicesSamotaev Nikolay0Oblov Konstantin1Ivanova Anastasia2National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) gas sensors is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors in comparison with classical clean room technologies using for mass production MEMS devices. The main technical factors affecting on using MOX sensors in various applications are presented. Current results demonstrate that using described technology possible to manufacturing all parts of MOX gas sensor in the SMD form-factor SOT-23 package type.https://doi.org/10.1051/matecconf/201820704003 |
| spellingShingle | Samotaev Nikolay Oblov Konstantin Ivanova Anastasia Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices MATEC Web of Conferences |
| title | Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices |
| title_full | Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices |
| title_fullStr | Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices |
| title_full_unstemmed | Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices |
| title_short | Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices |
| title_sort | laser micromilling technology as a key for rapid prototyping smd ceramic mems devices |
| url | https://doi.org/10.1051/matecconf/201820704003 |
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