High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment
This paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separat...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-05-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/6/623 |
| _version_ | 1797532309999583232 |
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| author | Fei Feng Pinggang Jia Jiang Qian Zhengpeng Hu Guowen An Li Qin |
| author_facet | Fei Feng Pinggang Jia Jiang Qian Zhengpeng Hu Guowen An Li Qin |
| author_sort | Fei Feng |
| collection | DOAJ |
| description | This paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separated sensing head and the gold-plated fiber are welded together by a carbon dioxide laser to form a fiber-optic Fabry–Perot high temperature pressure sensor, which uses a four-layer bonding technology to improve the sealing performance of the Fabry–Perot cavity. The test system of high temperature pressure sensor is set up, and the experimental data obtained are calculated and analyzed. The experimental results showed that the maximum linearity of the optical fiber pressure sensor was 1% in the temperature range of 20–400 °C. The pressure sensor exhibited a high linear sensitivity of about 1.38 nm/KPa at room temperature at a range of pressures from approximarely 0-to 1 MPa. The structure of the sensor is characterized by high consistency, which makes the structure more compact and the manufacturing process more controllable. |
| first_indexed | 2024-03-10T10:57:19Z |
| format | Article |
| id | doaj.art-30175bbae2f34b1b8fcf1447bf1674c5 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T10:57:19Z |
| publishDate | 2021-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-30175bbae2f34b1b8fcf1447bf1674c52023-11-21T21:46:06ZengMDPI AGMicromachines2072-666X2021-05-0112662310.3390/mi12060623High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature EnvironmentFei Feng0Pinggang Jia1Jiang Qian2Zhengpeng Hu3Guowen An4Li Qin5Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaThis paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separated sensing head and the gold-plated fiber are welded together by a carbon dioxide laser to form a fiber-optic Fabry–Perot high temperature pressure sensor, which uses a four-layer bonding technology to improve the sealing performance of the Fabry–Perot cavity. The test system of high temperature pressure sensor is set up, and the experimental data obtained are calculated and analyzed. The experimental results showed that the maximum linearity of the optical fiber pressure sensor was 1% in the temperature range of 20–400 °C. The pressure sensor exhibited a high linear sensitivity of about 1.38 nm/KPa at room temperature at a range of pressures from approximarely 0-to 1 MPa. The structure of the sensor is characterized by high consistency, which makes the structure more compact and the manufacturing process more controllable.https://www.mdpi.com/2072-666X/12/6/623MEMSFabry–Perotfiber optic sensorspressure measurementhigh-temperature |
| spellingShingle | Fei Feng Pinggang Jia Jiang Qian Zhengpeng Hu Guowen An Li Qin High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment Micromachines MEMS Fabry–Perot fiber optic sensors pressure measurement high-temperature |
| title | High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment |
| title_full | High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment |
| title_fullStr | High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment |
| title_full_unstemmed | High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment |
| title_short | High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment |
| title_sort | high consistency optical fiber fabry perot pressure sensor based on silicon mems technology for high temperature environment |
| topic | MEMS Fabry–Perot fiber optic sensors pressure measurement high-temperature |
| url | https://www.mdpi.com/2072-666X/12/6/623 |
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