A Review of MEMS Capacitive Microphones
This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/5/484 |
| _version_ | 1797568456444346368 |
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| author | Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin |
| author_facet | Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin |
| author_sort | Siti Aisyah Zawawi |
| collection | DOAJ |
| description | This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor. |
| first_indexed | 2024-03-10T19:57:13Z |
| format | Article |
| id | doaj.art-30bfebdf453d4615b50599e301f7dea0 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T19:57:13Z |
| publishDate | 2020-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-30bfebdf453d4615b50599e301f7dea02023-11-19T23:51:53ZengMDPI AGMicromachines2072-666X2020-05-0111548410.3390/mi11050484A Review of MEMS Capacitive MicrophonesSiti Aisyah Zawawi0Azrul Azlan Hamzah1Burhanuddin Yeop Majlis2Faisal Mohd-Yasin3Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, MalaysiaInstitute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, MalaysiaInstitute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, MalaysiaQueensland Micro- and Nanotechnology Centre, Griffith University, Brisbane QLD 4111, AustraliaThis review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.https://www.mdpi.com/2072-666X/11/5/484micro-electro-mechanical system (MEMS)capacitive microphonecondenser microphoneacoustic sensorevolution |
| spellingShingle | Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin A Review of MEMS Capacitive Microphones Micromachines micro-electro-mechanical system (MEMS) capacitive microphone condenser microphone acoustic sensor evolution |
| title | A Review of MEMS Capacitive Microphones |
| title_full | A Review of MEMS Capacitive Microphones |
| title_fullStr | A Review of MEMS Capacitive Microphones |
| title_full_unstemmed | A Review of MEMS Capacitive Microphones |
| title_short | A Review of MEMS Capacitive Microphones |
| title_sort | review of mems capacitive microphones |
| topic | micro-electro-mechanical system (MEMS) capacitive microphone condenser microphone acoustic sensor evolution |
| url | https://www.mdpi.com/2072-666X/11/5/484 |
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