Finite Temperature Ultraviolet-Visible Dielectric Functions of Tantalum Pentoxide: A Combined Spectroscopic Ellipsometry and First-Principles Study

Finite Temperature Ultraviolet-Visible Dielectric Functions of Tantalum Pentoxide: A Combined Spectroscopic Ellipsometry and First-Principles Study

Tantalum pentoxide (Ta<sub>2</sub>O<sub>5</sub>) has demonstrated promising applications in gate dielectrics and microwave communication devices with its intrinsically high dielectric constant and low dielectric loss. Although there are numerous studies on the dielectric prop...

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Bibliographic Details
Main Authors: Wenjie Zhang, Zhaohui Zeng, Tao Cheng, Tianhao Fei, Zhiwei Fu, Xiaoyan Liu, Jingyi Zhang, Jia-Yue Yang
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Photonics
Subjects:
dielectric function
spectroscopic ellipsometry
first-principles
temperature dependence
Online Access:https://www.mdpi.com/2304-6732/9/7/440

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