Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors
Optical sensors based on guided mode resonance (GMR) realized in polymers are promising candidates for sensitive and cost effective strain sensors. The benefit of GMR grating sensors is the non-contact, easy optical read-out with large working distance, avoiding costly alignment and packaging proced...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-06-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/11/3221 |
| _version_ | 1827715484783476736 |
|---|---|
| author | Marie-Aline Mattelin Jeroen Missinne Bert De Coensel Geert Van Steenberge |
| author_facet | Marie-Aline Mattelin Jeroen Missinne Bert De Coensel Geert Van Steenberge |
| author_sort | Marie-Aline Mattelin |
| collection | DOAJ |
| description | Optical sensors based on guided mode resonance (GMR) realized in polymers are promising candidates for sensitive and cost effective strain sensors. The benefit of GMR grating sensors is the non-contact, easy optical read-out with large working distance, avoiding costly alignment and packaging procedures. The GMR gratings with resonance around 850–900 nm are fabricated using electron beam lithography and replicated using a soft stamp based imprinting technique on 175 <inline-formula> <math display="inline"> <semantics> <mi mathvariant="sans-serif">μ</mi> </semantics> </math> </inline-formula>m-thick foils to make them suitable for optical strain sensing. For the strain measurements, foils are realized with both GMR gratings and waveguides with Bragg gratings. The latter are used as reference sensors and allow extracting the absolute strain sensitivity of the GMR sensor foils. Following this method, it is shown that GMR gratings have an absolute strain sensitivity of 1.02 ± 0.05 <inline-formula> <math display="inline"> <semantics> <mrow> <mi>pm</mi> <mo stretchy="false">/</mo> <mi mathvariant="sans-serif">μ</mi> <mi>ε</mi> </mrow> </semantics> </math> </inline-formula> at 870 nm. |
| first_indexed | 2024-03-10T19:20:37Z |
| format | Article |
| id | doaj.art-312ed1d69a4e4c929cb7080d7e02c112 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T19:20:37Z |
| publishDate | 2020-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-312ed1d69a4e4c929cb7080d7e02c1122023-11-20T03:01:02ZengMDPI AGSensors1424-82202020-06-012011322110.3390/s20113221Imprinted Polymer-Based Guided Mode Resonance Grating Strain SensorsMarie-Aline Mattelin0Jeroen Missinne1Bert De Coensel2Geert Van Steenberge3Center for Microsystems Technology (CMST), Ghent University and imec, 9052 Ghent, BelgiumCenter for Microsystems Technology (CMST), Ghent University and imec, 9052 Ghent, BelgiumWAVES Research Group, INTEC, Ghent University and imec, 9052 Ghent, BelgiumCenter for Microsystems Technology (CMST), Ghent University and imec, 9052 Ghent, BelgiumOptical sensors based on guided mode resonance (GMR) realized in polymers are promising candidates for sensitive and cost effective strain sensors. The benefit of GMR grating sensors is the non-contact, easy optical read-out with large working distance, avoiding costly alignment and packaging procedures. The GMR gratings with resonance around 850–900 nm are fabricated using electron beam lithography and replicated using a soft stamp based imprinting technique on 175 <inline-formula> <math display="inline"> <semantics> <mi mathvariant="sans-serif">μ</mi> </semantics> </math> </inline-formula>m-thick foils to make them suitable for optical strain sensing. For the strain measurements, foils are realized with both GMR gratings and waveguides with Bragg gratings. The latter are used as reference sensors and allow extracting the absolute strain sensitivity of the GMR sensor foils. Following this method, it is shown that GMR gratings have an absolute strain sensitivity of 1.02 ± 0.05 <inline-formula> <math display="inline"> <semantics> <mrow> <mi>pm</mi> <mo stretchy="false">/</mo> <mi mathvariant="sans-serif">μ</mi> <mi>ε</mi> </mrow> </semantics> </math> </inline-formula> at 870 nm.https://www.mdpi.com/1424-8220/20/11/3221guided mode resonance grating sensorwaveguide Bragg grating sensorflexible strain sensortemperature sensorpolymer foilOrmocer<sup>®</sup> |
| spellingShingle | Marie-Aline Mattelin Jeroen Missinne Bert De Coensel Geert Van Steenberge Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors Sensors guided mode resonance grating sensor waveguide Bragg grating sensor flexible strain sensor temperature sensor polymer foil Ormocer<sup>®</sup> |
| title | Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors |
| title_full | Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors |
| title_fullStr | Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors |
| title_full_unstemmed | Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors |
| title_short | Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors |
| title_sort | imprinted polymer based guided mode resonance grating strain sensors |
| topic | guided mode resonance grating sensor waveguide Bragg grating sensor flexible strain sensor temperature sensor polymer foil Ormocer<sup>®</sup> |
| url | https://www.mdpi.com/1424-8220/20/11/3221 |
| work_keys_str_mv | AT mariealinemattelin imprintedpolymerbasedguidedmoderesonancegratingstrainsensors AT jeroenmissinne imprintedpolymerbasedguidedmoderesonancegratingstrainsensors AT bertdecoensel imprintedpolymerbasedguidedmoderesonancegratingstrainsensors AT geertvansteenberge imprintedpolymerbasedguidedmoderesonancegratingstrainsensors |