A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is car...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-10-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/19/7593 |
| _version_ | 1797476871348158464 |
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| author | Honghui Wang Dingkang Zou Peng Peng Guangle Yao Jizhou Ren |
| author_facet | Honghui Wang Dingkang Zou Peng Peng Guangle Yao Jizhou Ren |
| author_sort | Honghui Wang |
| collection | DOAJ |
| description | This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is carried out, and the relationship between the structural parameters of the sensor and the stress is analyzed by finite element simulation and curve-fitting prediction, and then the optimal structural parameters are also analyzed. The simulation results indicate that the sensor with the CCSB structure proposed in this article obtained a high sensitivity of 87.74 μV/V/MPA and a low nonlinearity error of 0.28% full-scale span (FSS) within the pressure range of 0–200 MPa. Compared with All-Si Bulk, grooved All-Si Bulk, Si-Glass Bulk, silicon diaphragm, resistance strain gauge, and Fiber Bragg grating structure pressure sensors, the designed sensor has a significant improvement in sensitivity and nonlinearity error. It can be used as a new sensor for rock disaster (such as collapse) monitoring and forecasting. |
| first_indexed | 2024-03-09T21:09:55Z |
| format | Article |
| id | doaj.art-313804f09d3247b3a4cc6f00bb321495 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T21:09:55Z |
| publishDate | 2022-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-313804f09d3247b3a4cc6f00bb3214952023-11-23T21:51:42ZengMDPI AGSensors1424-82202022-10-012219759310.3390/s22197593A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress SensingHonghui Wang0Dingkang Zou1Peng Peng2Guangle Yao3Jizhou Ren4State Key Laboratory of Geohazard Prevention and Geoenvironment Protection, Chengdu University of Technology, Chengdu 610059, ChinaState Key Laboratory of Geohazard Prevention and Geoenvironment Protection, Chengdu University of Technology, Chengdu 610059, ChinaCollege of Computer Science and Cyber Security, Chengdu University of Technology, Chengdu 610059, ChinaCollege of Computer Science and Cyber Security, Chengdu University of Technology, Chengdu 610059, ChinaCollege of Computer Science and Cyber Security, Chengdu University of Technology, Chengdu 610059, ChinaThis paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is carried out, and the relationship between the structural parameters of the sensor and the stress is analyzed by finite element simulation and curve-fitting prediction, and then the optimal structural parameters are also analyzed. The simulation results indicate that the sensor with the CCSB structure proposed in this article obtained a high sensitivity of 87.74 μV/V/MPA and a low nonlinearity error of 0.28% full-scale span (FSS) within the pressure range of 0–200 MPa. Compared with All-Si Bulk, grooved All-Si Bulk, Si-Glass Bulk, silicon diaphragm, resistance strain gauge, and Fiber Bragg grating structure pressure sensors, the designed sensor has a significant improvement in sensitivity and nonlinearity error. It can be used as a new sensor for rock disaster (such as collapse) monitoring and forecasting.https://www.mdpi.com/1424-8220/22/19/7593rock stress sensingpiezoresistive pressure sensorMEMSsimulation |
| spellingShingle | Honghui Wang Dingkang Zou Peng Peng Guangle Yao Jizhou Ren A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing Sensors rock stress sensing piezoresistive pressure sensor MEMS simulation |
| title | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
| title_full | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
| title_fullStr | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
| title_full_unstemmed | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
| title_short | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
| title_sort | novel high sensitivity mems pressure sensor for rock mass stress sensing |
| topic | rock stress sensing piezoresistive pressure sensor MEMS simulation |
| url | https://www.mdpi.com/1424-8220/22/19/7593 |
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