Ultrafast Laser Welding of Silicon

While ultrafast laser welding is an appealing technique for bonding transparent workpieces, it is not applicable for joining silicon samples due to nonlinear propagation effects which dramatically diminish the possible energy deposition at the interface. It is demonstrated that these limitations can...

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Bibliographic Details
Main Authors: Maxime Chambonneau, Qingfeng Li, Markus Blothe, Stree Vithya Arumugam, Stefan Nolte
Format: Article
Language:English
Published: Wiley-VCH 2023-05-01
Series:Advanced Photonics Research
Subjects:
Online Access:https://doi.org/10.1002/adpr.202200300
Description
Summary:While ultrafast laser welding is an appealing technique for bonding transparent workpieces, it is not applicable for joining silicon samples due to nonlinear propagation effects which dramatically diminish the possible energy deposition at the interface. It is demonstrated that these limitations can be circumvented by local absorption enhancement at the interface thanks to metallic nanolayer deposition. By combining the resulting exalted absorption with filament relocation during ultrafast laser irradiation, silicon samples can be efficiently joined. Shear joining strengths >4 MPa are obtained for 21 nm gold nanolayers without laser‐induced alteration of the transmittance. Such remarkable strength values hold promise for applications in microelectronics, optics, and astronomy.
ISSN:2699-9293