Ultrafast Laser Welding of Silicon
While ultrafast laser welding is an appealing technique for bonding transparent workpieces, it is not applicable for joining silicon samples due to nonlinear propagation effects which dramatically diminish the possible energy deposition at the interface. It is demonstrated that these limitations can...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Wiley-VCH
2023-05-01
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| Series: | Advanced Photonics Research |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/adpr.202200300 |
| _version_ | 1827954024735834112 |
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| author | Maxime Chambonneau Qingfeng Li Markus Blothe Stree Vithya Arumugam Stefan Nolte |
| author_facet | Maxime Chambonneau Qingfeng Li Markus Blothe Stree Vithya Arumugam Stefan Nolte |
| author_sort | Maxime Chambonneau |
| collection | DOAJ |
| description | While ultrafast laser welding is an appealing technique for bonding transparent workpieces, it is not applicable for joining silicon samples due to nonlinear propagation effects which dramatically diminish the possible energy deposition at the interface. It is demonstrated that these limitations can be circumvented by local absorption enhancement at the interface thanks to metallic nanolayer deposition. By combining the resulting exalted absorption with filament relocation during ultrafast laser irradiation, silicon samples can be efficiently joined. Shear joining strengths >4 MPa are obtained for 21 nm gold nanolayers without laser‐induced alteration of the transmittance. Such remarkable strength values hold promise for applications in microelectronics, optics, and astronomy. |
| first_indexed | 2024-04-09T14:23:42Z |
| format | Article |
| id | doaj.art-31c6be2e5cba4947ae31b3f06857663f |
| institution | Directory Open Access Journal |
| issn | 2699-9293 |
| language | English |
| last_indexed | 2024-04-09T14:23:42Z |
| publishDate | 2023-05-01 |
| publisher | Wiley-VCH |
| record_format | Article |
| series | Advanced Photonics Research |
| spelling | doaj.art-31c6be2e5cba4947ae31b3f06857663f2023-05-04T12:49:11ZengWiley-VCHAdvanced Photonics Research2699-92932023-05-0145n/an/a10.1002/adpr.202200300Ultrafast Laser Welding of SiliconMaxime Chambonneau0Qingfeng Li1Markus Blothe2Stree Vithya Arumugam3Stefan Nolte4Institute of Applied Physics Abbe Center of Photonics Friedrich Schiller University Jena Albert-Einstein-Straße 15 07745 Jena GermanyInstitute of Applied Physics Abbe Center of Photonics Friedrich Schiller University Jena Albert-Einstein-Straße 15 07745 Jena GermanyInstitute of Applied Physics Abbe Center of Photonics Friedrich Schiller University Jena Albert-Einstein-Straße 15 07745 Jena GermanyInstitute of Applied Physics Abbe Center of Photonics Friedrich Schiller University Jena Albert-Einstein-Straße 15 07745 Jena GermanyInstitute of Applied Physics Abbe Center of Photonics Friedrich Schiller University Jena Albert-Einstein-Straße 15 07745 Jena GermanyWhile ultrafast laser welding is an appealing technique for bonding transparent workpieces, it is not applicable for joining silicon samples due to nonlinear propagation effects which dramatically diminish the possible energy deposition at the interface. It is demonstrated that these limitations can be circumvented by local absorption enhancement at the interface thanks to metallic nanolayer deposition. By combining the resulting exalted absorption with filament relocation during ultrafast laser irradiation, silicon samples can be efficiently joined. Shear joining strengths >4 MPa are obtained for 21 nm gold nanolayers without laser‐induced alteration of the transmittance. Such remarkable strength values hold promise for applications in microelectronics, optics, and astronomy.https://doi.org/10.1002/adpr.202200300filamentationlaserlaser weldingmicro‐processingsiliconthin films |
| spellingShingle | Maxime Chambonneau Qingfeng Li Markus Blothe Stree Vithya Arumugam Stefan Nolte Ultrafast Laser Welding of Silicon Advanced Photonics Research filamentation laser laser welding micro‐processing silicon thin films |
| title | Ultrafast Laser Welding of Silicon |
| title_full | Ultrafast Laser Welding of Silicon |
| title_fullStr | Ultrafast Laser Welding of Silicon |
| title_full_unstemmed | Ultrafast Laser Welding of Silicon |
| title_short | Ultrafast Laser Welding of Silicon |
| title_sort | ultrafast laser welding of silicon |
| topic | filamentation laser laser welding micro‐processing silicon thin films |
| url | https://doi.org/10.1002/adpr.202200300 |
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