A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer
We propose a sub-1 Hz resonance frequency MEMS resonator that can be used for seismometers. The low resonance frequency is achieved by an electrically tunable spring with an ultra-small spring constant. Generally, it is difficult to electrically fine-tune the resonance frequency at a near-zero sprin...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-12-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/1/63 |
| _version_ | 1797491875598303232 |
|---|---|
| author | Jun Wu Hideyuki Maekoba Arnaud Parent Tamio Ikehashi |
| author_facet | Jun Wu Hideyuki Maekoba Arnaud Parent Tamio Ikehashi |
| author_sort | Jun Wu |
| collection | DOAJ |
| description | We propose a sub-1 Hz resonance frequency MEMS resonator that can be used for seismometers. The low resonance frequency is achieved by an electrically tunable spring with an ultra-small spring constant. Generally, it is difficult to electrically fine-tune the resonance frequency at a near-zero spring constant because the frequency shift per voltage will diverge at the limit of zero spring constant. To circumvent this issue, we propose a multi-step electrical tuning method. We show by simulations that the resonance frequency can be tuned by 0.008 Hz/mV even in the sub-1 Hz region. The small spring constant, however, reduces the shock robustness and dynamic range of the seismometer. To prevent this, we employ a force-balanced method in which the mass displacement is nulled by the feedback force. We show that the displacement can be obtained from the voltage that generates the feedback force. |
| first_indexed | 2024-03-10T00:54:36Z |
| format | Article |
| id | doaj.art-329e270449cd4f469b95e398872ca80d |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T00:54:36Z |
| publishDate | 2021-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-329e270449cd4f469b95e398872ca80d2023-11-23T14:44:18ZengMDPI AGMicromachines2072-666X2021-12-011316310.3390/mi13010063A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-SeismometerJun Wu0Hideyuki Maekoba1Arnaud Parent2Tamio Ikehashi3Graduate School of Information Production and Systems, Waseda University, Kitakyushu-shi 808-0135, JapanCoventor, A Lam Research Company, Fremont, CA 94538, USACoventor, A Lam Research Company, Fremont, CA 94538, USAGraduate School of Information Production and Systems, Waseda University, Kitakyushu-shi 808-0135, JapanWe propose a sub-1 Hz resonance frequency MEMS resonator that can be used for seismometers. The low resonance frequency is achieved by an electrically tunable spring with an ultra-small spring constant. Generally, it is difficult to electrically fine-tune the resonance frequency at a near-zero spring constant because the frequency shift per voltage will diverge at the limit of zero spring constant. To circumvent this issue, we propose a multi-step electrical tuning method. We show by simulations that the resonance frequency can be tuned by 0.008 Hz/mV even in the sub-1 Hz region. The small spring constant, however, reduces the shock robustness and dynamic range of the seismometer. To prevent this, we employ a force-balanced method in which the mass displacement is nulled by the feedback force. We show that the displacement can be obtained from the voltage that generates the feedback force.https://www.mdpi.com/2072-666X/13/1/63MEMSseismometerresonance frequencyforce-balancedelectrical tuning |
| spellingShingle | Jun Wu Hideyuki Maekoba Arnaud Parent Tamio Ikehashi A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer Micromachines MEMS seismometer resonance frequency force-balanced electrical tuning |
| title | A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer |
| title_full | A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer |
| title_fullStr | A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer |
| title_full_unstemmed | A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer |
| title_short | A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer |
| title_sort | sub 1 hz resonance frequency resonator enabled by multi step tuning for micro seismometer |
| topic | MEMS seismometer resonance frequency force-balanced electrical tuning |
| url | https://www.mdpi.com/2072-666X/13/1/63 |
| work_keys_str_mv | AT junwu asub1hzresonancefrequencyresonatorenabledbymultisteptuningformicroseismometer AT hideyukimaekoba asub1hzresonancefrequencyresonatorenabledbymultisteptuningformicroseismometer AT arnaudparent asub1hzresonancefrequencyresonatorenabledbymultisteptuningformicroseismometer AT tamioikehashi asub1hzresonancefrequencyresonatorenabledbymultisteptuningformicroseismometer AT junwu sub1hzresonancefrequencyresonatorenabledbymultisteptuningformicroseismometer AT hideyukimaekoba sub1hzresonancefrequencyresonatorenabledbymultisteptuningformicroseismometer AT arnaudparent sub1hzresonancefrequencyresonatorenabledbymultisteptuningformicroseismometer AT tamioikehashi sub1hzresonancefrequencyresonatorenabledbymultisteptuningformicroseismometer |