Fundamental scaling properties of electro-mechanical switches

We discuss the fundamental processes including electron conduction and adhesion of metallic contacts pertaining to the scaling of the performance metrics of nano-electro-mechanical switches. In particular, we show that under most circumstances, the switching energy is governed by the force that is n...

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Main Authors: A W Knoll, D Grogg, M Despont, U Duerig
Format: Article
Language:English
Published: IOP Publishing 2012-01-01
Series:New Journal of Physics
Online Access:https://doi.org/10.1088/1367-2630/14/12/123007
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author A W Knoll
D Grogg
M Despont
U Duerig
author_facet A W Knoll
D Grogg
M Despont
U Duerig
author_sort A W Knoll
collection DOAJ
description We discuss the fundamental processes including electron conduction and adhesion of metallic contacts pertaining to the scaling of the performance metrics of nano-electro-mechanical switches. In particular, we show that under most circumstances, the switching energy is governed by the force that is needed in order to break the electrical contact when opening the switch. For an optimally designed parallel plate capacitor switch, the energy consumption does not depend on the actuation voltage. However, stray capacitances degrade the energy efficiency if a high operating voltage is chosen. The limit is of the order of 1 V for an aggressively scaled Si device, for which an overall switching energy of the order of 150 eV, a footprint area of 2500 nm ^2 and a switching time of 200 ps are predicted. The scaling analysis also stipulates that materials with a low free electron density and high effective mass should be used for the electrical contact, which is counter-intuitive, as such materials are known to be poor conductors on the macroscopic scale.
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spelling doaj.art-32b658290dd64943858297cb00cdff942023-08-08T11:09:43ZengIOP PublishingNew Journal of Physics1367-26302012-01-01141212300710.1088/1367-2630/14/12/123007Fundamental scaling properties of electro-mechanical switchesA W Knoll0D Grogg1M Despont2U Duerig3IBM Research—Zurich, Säumerstrasse 4, CH-8803 Rüschlikon, SwitzerlandIBM Research—Zurich, Säumerstrasse 4, CH-8803 Rüschlikon, SwitzerlandIBM Research—Zurich, Säumerstrasse 4, CH-8803 Rüschlikon, SwitzerlandIBM Research—Zurich, Säumerstrasse 4, CH-8803 Rüschlikon, SwitzerlandWe discuss the fundamental processes including electron conduction and adhesion of metallic contacts pertaining to the scaling of the performance metrics of nano-electro-mechanical switches. In particular, we show that under most circumstances, the switching energy is governed by the force that is needed in order to break the electrical contact when opening the switch. For an optimally designed parallel plate capacitor switch, the energy consumption does not depend on the actuation voltage. However, stray capacitances degrade the energy efficiency if a high operating voltage is chosen. The limit is of the order of 1 V for an aggressively scaled Si device, for which an overall switching energy of the order of 150 eV, a footprint area of 2500 nm ^2 and a switching time of 200 ps are predicted. The scaling analysis also stipulates that materials with a low free electron density and high effective mass should be used for the electrical contact, which is counter-intuitive, as such materials are known to be poor conductors on the macroscopic scale.https://doi.org/10.1088/1367-2630/14/12/123007
spellingShingle A W Knoll
D Grogg
M Despont
U Duerig
Fundamental scaling properties of electro-mechanical switches
New Journal of Physics
title Fundamental scaling properties of electro-mechanical switches
title_full Fundamental scaling properties of electro-mechanical switches
title_fullStr Fundamental scaling properties of electro-mechanical switches
title_full_unstemmed Fundamental scaling properties of electro-mechanical switches
title_short Fundamental scaling properties of electro-mechanical switches
title_sort fundamental scaling properties of electro mechanical switches
url https://doi.org/10.1088/1367-2630/14/12/123007
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AT dgrogg fundamentalscalingpropertiesofelectromechanicalswitches
AT mdespont fundamentalscalingpropertiesofelectromechanicalswitches
AT uduerig fundamentalscalingpropertiesofelectromechanicalswitches