Fundamental scaling properties of electro-mechanical switches

We discuss the fundamental processes including electron conduction and adhesion of metallic contacts pertaining to the scaling of the performance metrics of nano-electro-mechanical switches. In particular, we show that under most circumstances, the switching energy is governed by the force that is n...

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Bibliographic Details
Main Authors: A W Knoll, D Grogg, M Despont, U Duerig
Format: Article
Language:English
Published: IOP Publishing 2012-01-01
Series:New Journal of Physics
Online Access:https://doi.org/10.1088/1367-2630/14/12/123007

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