Fundamental scaling properties of electro-mechanical switches
We discuss the fundamental processes including electron conduction and adhesion of metallic contacts pertaining to the scaling of the performance metrics of nano-electro-mechanical switches. In particular, we show that under most circumstances, the switching energy is governed by the force that is n...
Main Authors: | A W Knoll, D Grogg, M Despont, U Duerig |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2012-01-01
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Series: | New Journal of Physics |
Online Access: | https://doi.org/10.1088/1367-2630/14/12/123007 |
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