Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope
Although the Lissajous frequency modulated (LFM) mode can improve the long-term and temperature stability of the scale factor (SF) for mode mismatch MEMS gyroscopes, its SF nonlinearity poses a significant limitation for full-scale accuracy maintenance. This paper examines the interaction effects am...
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MDPI AG
2023-12-01
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| Online Access: | https://www.mdpi.com/1424-8220/23/24/9701 |
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| author | Rui Li Xiaoxu Wang Kaichen Yan Zhennan Chen Zhengya Ma Xiquan Wang Ao Zhang Qianbo Lu |
| author_facet | Rui Li Xiaoxu Wang Kaichen Yan Zhennan Chen Zhengya Ma Xiquan Wang Ao Zhang Qianbo Lu |
| author_sort | Rui Li |
| collection | DOAJ |
| description | Although the Lissajous frequency modulated (LFM) mode can improve the long-term and temperature stability of the scale factor (SF) for mode mismatch MEMS gyroscopes, its SF nonlinearity poses a significant limitation for full-scale accuracy maintenance. This paper examines the interaction effects among stiffness coupling, system phase delay, readout demodulation phase shift, and velocity amplitude mismatch within the control process. Based on the completion of frequency difference control and demodulation phase matching, we clarify that the remaining stiffness coupling and residual system phase error are the primary factors influencing SF nonlinearity. Furthermore, SF nonlinearity is reduced through error compensation. On one hand, this paper suppresses stiffness coupling through the observation of the instantaneous frequency difference and the application of the quadrature voltage. On the other hand, system phase error is compensated by observing the amplitude control force and tuning the reference in the Phase-Locked Loops (PLLs). Subsequent simulations of these methods demonstrated a remarkable 97% reduction in SF nonlinearity within the measurement range of ±500°/s. In addition, an observed rule dictates that maintaining a sufficiently large frequency split effectively constrains the SF nonlinearity. |
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| institution | Directory Open Access Journal |
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| language | English |
| last_indexed | 2024-03-08T20:22:50Z |
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| spelling | doaj.art-32ccebd44fea4e67a1a21ae36ffb5ba42023-12-22T14:40:17ZengMDPI AGSensors1424-82202023-12-012324970110.3390/s23249701Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS GyroscopeRui Li0Xiaoxu Wang1Kaichen Yan2Zhennan Chen3Zhengya Ma4Xiquan Wang5Ao Zhang6Qianbo Lu7Institute of Flexible Electronics, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi’an 710072, ChinaSchool of Automation, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi’an 710072, ChinaSchool of Automation, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi’an 710072, ChinaSchool of Automation, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi’an 710072, ChinaSchool of Automation, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi’an 710072, ChinaSchool of Automation, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi’an 710072, ChinaSchool of Automation, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi’an 710072, ChinaInstitute of Flexible Electronics, Northwestern Polytechnical University, 127 West Youyi Road, Beilin District, Xi’an 710072, ChinaAlthough the Lissajous frequency modulated (LFM) mode can improve the long-term and temperature stability of the scale factor (SF) for mode mismatch MEMS gyroscopes, its SF nonlinearity poses a significant limitation for full-scale accuracy maintenance. This paper examines the interaction effects among stiffness coupling, system phase delay, readout demodulation phase shift, and velocity amplitude mismatch within the control process. Based on the completion of frequency difference control and demodulation phase matching, we clarify that the remaining stiffness coupling and residual system phase error are the primary factors influencing SF nonlinearity. Furthermore, SF nonlinearity is reduced through error compensation. On one hand, this paper suppresses stiffness coupling through the observation of the instantaneous frequency difference and the application of the quadrature voltage. On the other hand, system phase error is compensated by observing the amplitude control force and tuning the reference in the Phase-Locked Loops (PLLs). Subsequent simulations of these methods demonstrated a remarkable 97% reduction in SF nonlinearity within the measurement range of ±500°/s. In addition, an observed rule dictates that maintaining a sufficiently large frequency split effectively constrains the SF nonlinearity.https://www.mdpi.com/1424-8220/23/24/9701Lissajous frequency modulation (LFM)scale factor nonlinearitystiffness couplingphase errorfrequency difference |
| spellingShingle | Rui Li Xiaoxu Wang Kaichen Yan Zhennan Chen Zhengya Ma Xiquan Wang Ao Zhang Qianbo Lu Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope Sensors Lissajous frequency modulation (LFM) scale factor nonlinearity stiffness coupling phase error frequency difference |
| title | Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope |
| title_full | Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope |
| title_fullStr | Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope |
| title_full_unstemmed | Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope |
| title_short | Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope |
| title_sort | interactive errors analysis and scale factor nonlinearity reduction methods for lissajous frequency modulated mems gyroscope |
| topic | Lissajous frequency modulation (LFM) scale factor nonlinearity stiffness coupling phase error frequency difference |
| url | https://www.mdpi.com/1424-8220/23/24/9701 |
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