Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope

Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope

Although the Lissajous frequency modulated (LFM) mode can improve the long-term and temperature stability of the scale factor (SF) for mode mismatch MEMS gyroscopes, its SF nonlinearity poses a significant limitation for full-scale accuracy maintenance. This paper examines the interaction effects am...

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Bibliographic Details
Main Authors: Rui Li, Xiaoxu Wang, Kaichen Yan, Zhennan Chen, Zhengya Ma, Xiquan Wang, Ao Zhang, Qianbo Lu
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Sensors
Subjects:
Lissajous frequency modulation (LFM)
scale factor nonlinearity
stiffness coupling
phase error
frequency difference
Online Access:https://www.mdpi.com/1424-8220/23/24/9701

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