Scanning Micromirror Platform Based on MEMS Technology for Medical Application
This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundament...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/7/2/24 |
| _version_ | 1811235344377446400 |
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| author | Eakkachai Pengwang Kanty Rabenorosoa Micky Rakotondrabe Nicolas Andreff |
| author_facet | Eakkachai Pengwang Kanty Rabenorosoa Micky Rakotondrabe Nicolas Andreff |
| author_sort | Eakkachai Pengwang |
| collection | DOAJ |
| description | This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility. |
| first_indexed | 2024-04-12T11:49:11Z |
| format | Article |
| id | doaj.art-32f6c2579a2841d1a3107969a80af38c |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-04-12T11:49:11Z |
| publishDate | 2016-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-32f6c2579a2841d1a3107969a80af38c2022-12-22T03:34:13ZengMDPI AGMicromachines2072-666X2016-02-01722410.3390/mi7020024mi7020024Scanning Micromirror Platform Based on MEMS Technology for Medical ApplicationEakkachai Pengwang0Kanty Rabenorosoa1Micky Rakotondrabe2Nicolas Andreff3Automatic Control and Micro-Mechatronic Systems Department (AS2M), FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM, Besancon 25000, FranceAutomatic Control and Micro-Mechatronic Systems Department (AS2M), FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM, Besancon 25000, FranceAutomatic Control and Micro-Mechatronic Systems Department (AS2M), FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM, Besancon 25000, FranceAutomatic Control and Micro-Mechatronic Systems Department (AS2M), FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM, Besancon 25000, FranceThis topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility.http://www.mdpi.com/2072-666X/7/2/24micro robotsoptical MEMSMEMS scanning micromirrorbiomedical micro-actuatormulti-degree-of-freedom stagebioMEMSMOEMSmicro-optics |
| spellingShingle | Eakkachai Pengwang Kanty Rabenorosoa Micky Rakotondrabe Nicolas Andreff Scanning Micromirror Platform Based on MEMS Technology for Medical Application Micromachines micro robots optical MEMS MEMS scanning micromirror biomedical micro-actuator multi-degree-of-freedom stage bioMEMS MOEMS micro-optics |
| title | Scanning Micromirror Platform Based on MEMS Technology for Medical Application |
| title_full | Scanning Micromirror Platform Based on MEMS Technology for Medical Application |
| title_fullStr | Scanning Micromirror Platform Based on MEMS Technology for Medical Application |
| title_full_unstemmed | Scanning Micromirror Platform Based on MEMS Technology for Medical Application |
| title_short | Scanning Micromirror Platform Based on MEMS Technology for Medical Application |
| title_sort | scanning micromirror platform based on mems technology for medical application |
| topic | micro robots optical MEMS MEMS scanning micromirror biomedical micro-actuator multi-degree-of-freedom stage bioMEMS MOEMS micro-optics |
| url | http://www.mdpi.com/2072-666X/7/2/24 |
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